MULTI-ELECTRODE CONDUCTIVE PROBE, MANUFACTURING METHOD OF INSULATING TRENCHES AND MEASUREMENT METHOD USING MULTI-ELECTRODE CONDUCTIVE PROBE

Hao-Chih Liu (Inventor)

Research output: Patent

Abstract

A multi-electrode conductive probe, a manufacturing method of insulating trenches and a measurement method using the multi-electrode conductive probe are disclosed. The conductive probe includes a base, a plurality of support elements, a plurality of tips and a conductive layer. The base has a surface and a plurality of protrusions. The protrusions are configured on the surface in a spacing manner, and an insulating trench is disposed between the two adjacent protrusions. The support elements are disposed at the base and protrude from the base. The tips are disposed on the end of the support elements away from the base. The conductive layer covers the surface of the base, the protrusions, the support elements and the tips. Portions of the conductive layer on the two adjacent support elements are electrically insulated from each other by at least an insulating trench.
Translated title of the contribution多極導電探針、絕緣溝槽製造方法及使用多極導電探針的量測方法
Original languageEnglish
Patent number9739802
Publication statusPublished - 2015 Jul 9

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