Abstract
The present invention is a multi-gas sensor and a method for fabricating the multi-gas sensor. The multi-gas sensor comprises a substrate, an epitaxial layer, a metal oxide layer, a first metal layer, a second metal layer and multiple third metal layers. The method for fabricating the multi-gas sensor comprises steps of forming an epitaxial layer on a substrate; etching the epitaxial layer to form a first epitaxial structure and a second epitaxial structure a fixed distance from the first epitaxial structure; forming a metal oxide layer
| Translated title of the contribution | 多重氣體感測器及其製作方法 |
|---|---|
| Original language | English |
| Patent number | 8330169 |
| Publication status | Published - 1800 |