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Multi-gas sensor and metod of fabricating the sensor
Huey-Ing Chen (Inventor),
Wen-Chau Liu
(Inventor)
Department of Chemical Engineering
Master Degree Program on Nano-Integrated-Circuit Engineering
Research output
:
Patent
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Physics & Astronomy
etching
15%
gases
83%
inventions
26%
metal oxides
39%
metals
31%
sensors
100%