Multivariate simulation assessment for virtual metrology

Yeh Tung Chen, Haw Ching Yang, Fan-Tien Cheng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Citations (Scopus)

Abstract

To reduce cost, this paper proposes a system architecture to simulate and assess the multivariate of equipment properties. The architecture integrates the Monte Carlo simulation, the Neural Network model and the sensitivity analysis to construct a virtual metrology system. By assuming the property's probability distribution, the architecture generates the extreme input data to supplement the actual data for enhancing the model accuracy and estimating the property trend. An industrial case applied to validate the proposed system architecture.

Original languageEnglish
Title of host publicationProceedings 2006 IEEE International Conference on Robotics and Automation, ICRA 2006
Pages1048-1053
Number of pages6
DOIs
Publication statusPublished - 2006 Dec 27
Event2006 IEEE International Conference on Robotics and Automation, ICRA 2006 - Orlando, FL, United States
Duration: 2006 May 152006 May 19

Publication series

NameProceedings - IEEE International Conference on Robotics and Automation
Volume2006
ISSN (Print)1050-4729

Other

Other2006 IEEE International Conference on Robotics and Automation, ICRA 2006
CountryUnited States
CityOrlando, FL
Period06-05-1506-05-19

Fingerprint

Probability distributions
Sensitivity analysis
Neural networks
Costs
Monte Carlo simulation

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Artificial Intelligence
  • Electrical and Electronic Engineering

Cite this

Chen, Y. T., Yang, H. C., & Cheng, F-T. (2006). Multivariate simulation assessment for virtual metrology. In Proceedings 2006 IEEE International Conference on Robotics and Automation, ICRA 2006 (pp. 1048-1053). [1641848] (Proceedings - IEEE International Conference on Robotics and Automation; Vol. 2006). https://doi.org/10.1109/ROBOT.2006.1641848
Chen, Yeh Tung ; Yang, Haw Ching ; Cheng, Fan-Tien. / Multivariate simulation assessment for virtual metrology. Proceedings 2006 IEEE International Conference on Robotics and Automation, ICRA 2006. 2006. pp. 1048-1053 (Proceedings - IEEE International Conference on Robotics and Automation).
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Chen, YT, Yang, HC & Cheng, F-T 2006, Multivariate simulation assessment for virtual metrology. in Proceedings 2006 IEEE International Conference on Robotics and Automation, ICRA 2006., 1641848, Proceedings - IEEE International Conference on Robotics and Automation, vol. 2006, pp. 1048-1053, 2006 IEEE International Conference on Robotics and Automation, ICRA 2006, Orlando, FL, United States, 06-05-15. https://doi.org/10.1109/ROBOT.2006.1641848

Multivariate simulation assessment for virtual metrology. / Chen, Yeh Tung; Yang, Haw Ching; Cheng, Fan-Tien.

Proceedings 2006 IEEE International Conference on Robotics and Automation, ICRA 2006. 2006. p. 1048-1053 1641848 (Proceedings - IEEE International Conference on Robotics and Automation; Vol. 2006).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Chen YT, Yang HC, Cheng F-T. Multivariate simulation assessment for virtual metrology. In Proceedings 2006 IEEE International Conference on Robotics and Automation, ICRA 2006. 2006. p. 1048-1053. 1641848. (Proceedings - IEEE International Conference on Robotics and Automation). https://doi.org/10.1109/ROBOT.2006.1641848