TY - GEN
T1 - Multivariate simulation assessment for virtual metrology
AU - Chen, Yeh Tung
AU - Yang, Haw Ching
AU - Cheng, Fan Tien
PY - 2006
Y1 - 2006
N2 - To reduce cost, this paper proposes a system architecture to simulate and assess the multivariate of equipment properties. The architecture integrates the Monte Carlo simulation, the Neural Network model and the sensitivity analysis to construct a virtual metrology system. By assuming the property's probability distribution, the architecture generates the extreme input data to supplement the actual data for enhancing the model accuracy and estimating the property trend. An industrial case applied to validate the proposed system architecture.
AB - To reduce cost, this paper proposes a system architecture to simulate and assess the multivariate of equipment properties. The architecture integrates the Monte Carlo simulation, the Neural Network model and the sensitivity analysis to construct a virtual metrology system. By assuming the property's probability distribution, the architecture generates the extreme input data to supplement the actual data for enhancing the model accuracy and estimating the property trend. An industrial case applied to validate the proposed system architecture.
UR - http://www.scopus.com/inward/record.url?scp=33845672258&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33845672258&partnerID=8YFLogxK
U2 - 10.1109/ROBOT.2006.1641848
DO - 10.1109/ROBOT.2006.1641848
M3 - Conference contribution
AN - SCOPUS:33845672258
SN - 0780395069
SN - 9780780395060
T3 - Proceedings - IEEE International Conference on Robotics and Automation
SP - 1048
EP - 1053
BT - Proceedings 2006 IEEE International Conference on Robotics and Automation, ICRA 2006
T2 - 2006 IEEE International Conference on Robotics and Automation, ICRA 2006
Y2 - 15 May 2006 through 19 May 2006
ER -