Skip to main navigation Skip to search Skip to main content

Nano-particle interaction during chemical-mechanical polishing

  • Dedy Ng
  • , Milind Kulkarni
  • , Hong Liang
  • , Yeau Ren Jeng
  • , Pai Yau Huang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fingerprint

Dive into the research topics of 'Nano-particle interaction during chemical-mechanical polishing'. Together they form a unique fingerprint.
Sort by

Engineering

Material Science

Chemical Engineering

Keyphrases