Nano-scale positioning design with piezoelectric materials

Yung Yue Chen, Yung Hsiang Chen, Chiung Yau Huang

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

Piezoelectric materials naturally possess high potential to deliver nano-scale positioning resolution; hence, they are adopted in a variety of engineering applications widely. Unfortunately, unacceptable positioning errors always appear because of the natural hysteresis effect of the piezoelectric materials. This natural property must be mitigated in practical applications. For solving this drawback, a nonlinear positioning design is proposed in this article. This nonlinear positioning design of piezoelectric materials is realized by the following four steps: 1. The famous Bouc-Wen model is utilized to present the input and output behaviors of piezoelectric materials; 2. System parameters of the Bouc-Wen model that describe the characteristics of piezoelectric materials are simultaneously identified with the particle swam optimization method; 3. Stability verification for the identified Bouc-Wen model; 4. A nonlinear feedback linearization control design is derived for the nano-scale positioning design of the piezoelectric material, mathematically. One important contribution of this investigation is that the positioning error between the output displacement of the controlled piezoelectric materials and the desired trajectory in nano-scale level can be proven to converge to zero asymptotically, under the effect of the hysteresis.

Original languageEnglish
Article number360
JournalMicromachines
Volume8
Issue number12
DOIs
Publication statusPublished - 2017 Dec 12

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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