Nano temperature sensor using selective lateral growth of carbon nanotube between electrodes

Cheng Yung Kuo; Chia Lang Chan; Chie Gau; Chien Wei Liu; Shiuan Hua Shiau; Jyh Hua Ting

doi:10.1109/TNANO.2006.888531

Nano temperature sensor using selective lateral growth of carbon nanotube between electrodes

Cheng Yung Kuo, Chia Lang Chan, Chie Gau, Chien Wei Liu, Shiuan Hua Shiau, Jyh Hua Ting

Research output: Contribution to journal › Article › peer-review

55 Citations (Scopus)

Abstract

This paper presents lateral growth of carbon nanotube (CNT) between two electrodes and its use as nano temperature sensor. Fabrication of electrodes is made by MEMS techniques. The CNT is grown selectively by microwave plasma chemical vapor deposition between two electrodes. After wire bonding, the grown CNT is tested and calibrated. The growth conditions of CNT, such as the flow rate of CH₄ or N₂ gas, are varied to obtain a high-quality CNT sensor. SEM is used to observe the shape and structure of CNT, while Raman spectrum analysis is used to indicate the degree of graphitization or amorphrous structure in the CNT. The I-V curve of CNT is measured at different temperature, and a linear relationship between the electric resistance of CNT and the temperature is obtained. This result indicates that CNT can be used as a temperature sensor.

Original language	English
Pages (from-to)	63-69
Number of pages	7
Journal	IEEE Transactions on Nanotechnology
Volume	6
Issue number	1
DOIs	https://doi.org/10.1109/TNANO.2006.888531
Publication status	Published - 2007 Jan

All Science Journal Classification (ASJC) codes

Computer Science Applications
Electrical and Electronic Engineering

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10.1109/TNANO.2006.888531

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title = "Nano temperature sensor using selective lateral growth of carbon nanotube between electrodes",

abstract = "This paper presents lateral growth of carbon nanotube (CNT) between two electrodes and its use as nano temperature sensor. Fabrication of electrodes is made by MEMS techniques. The CNT is grown selectively by microwave plasma chemical vapor deposition between two electrodes. After wire bonding, the grown CNT is tested and calibrated. The growth conditions of CNT, such as the flow rate of CH4 or N2 gas, are varied to obtain a high-quality CNT sensor. SEM is used to observe the shape and structure of CNT, while Raman spectrum analysis is used to indicate the degree of graphitization or amorphrous structure in the CNT. The I-V curve of CNT is measured at different temperature, and a linear relationship between the electric resistance of CNT and the temperature is obtained. This result indicates that CNT can be used as a temperature sensor.",

author = "Kuo, {Cheng Yung} and Chan, {Chia Lang} and Chie Gau and Liu, {Chien Wei} and Shiau, {Shiuan Hua} and Ting, {Jyh Hua}",

note = "Funding Information: Manuscript received May 13, 2006; revised August 18, 2006. This work was supported by the National Nano Device Laboratory under Contact NDL -92S-C-052. The review of this paper was arranged by Associate Editor G. Ramanath. C. Y. Kuo, C. L. Chan, C. Gau, and S. H. Shiau are with the National Cheng Kung University, Tainan 70101, Taiwan, ROC (e-mail: gauc@mail.nctu.edu. tw). C.-W. Liu, and J.-H. Ting is with the National Nano Device Laboratory, Tainan 74401, Taiwan, ROC. Color versions of Figs. 1 and 6-9 and Table I are available online at http:// ieeexplore.ieee.org. Digital Object Identifier 10.1109/TNANO.2006.888531 Fig. 1. (a) Fabrication process for the electrodes; nickel catalyst is covered on the top by the electrodes. (b) Schematic diagram for completed nanosensor chip.",

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doi = "10.1109/TNANO.2006.888531",

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AU - Kuo, Cheng Yung

AU - Chan, Chia Lang

AU - Gau, Chie

AU - Liu, Chien Wei

AU - Shiau, Shiuan Hua

AU - Ting, Jyh Hua

N1 - Funding Information: Manuscript received May 13, 2006; revised August 18, 2006. This work was supported by the National Nano Device Laboratory under Contact NDL -92S-C-052. The review of this paper was arranged by Associate Editor G. Ramanath. C. Y. Kuo, C. L. Chan, C. Gau, and S. H. Shiau are with the National Cheng Kung University, Tainan 70101, Taiwan, ROC (e-mail: gauc@mail.nctu.edu. tw). C.-W. Liu, and J.-H. Ting is with the National Nano Device Laboratory, Tainan 74401, Taiwan, ROC. Color versions of Figs. 1 and 6-9 and Table I are available online at http:// ieeexplore.ieee.org. Digital Object Identifier 10.1109/TNANO.2006.888531 Fig. 1. (a) Fabrication process for the electrodes; nickel catalyst is covered on the top by the electrodes. (b) Schematic diagram for completed nanosensor chip.

PY - 2007/1

Y1 - 2007/1

N2 - This paper presents lateral growth of carbon nanotube (CNT) between two electrodes and its use as nano temperature sensor. Fabrication of electrodes is made by MEMS techniques. The CNT is grown selectively by microwave plasma chemical vapor deposition between two electrodes. After wire bonding, the grown CNT is tested and calibrated. The growth conditions of CNT, such as the flow rate of CH4 or N2 gas, are varied to obtain a high-quality CNT sensor. SEM is used to observe the shape and structure of CNT, while Raman spectrum analysis is used to indicate the degree of graphitization or amorphrous structure in the CNT. The I-V curve of CNT is measured at different temperature, and a linear relationship between the electric resistance of CNT and the temperature is obtained. This result indicates that CNT can be used as a temperature sensor.

AB - This paper presents lateral growth of carbon nanotube (CNT) between two electrodes and its use as nano temperature sensor. Fabrication of electrodes is made by MEMS techniques. The CNT is grown selectively by microwave plasma chemical vapor deposition between two electrodes. After wire bonding, the grown CNT is tested and calibrated. The growth conditions of CNT, such as the flow rate of CH4 or N2 gas, are varied to obtain a high-quality CNT sensor. SEM is used to observe the shape and structure of CNT, while Raman spectrum analysis is used to indicate the degree of graphitization or amorphrous structure in the CNT. The I-V curve of CNT is measured at different temperature, and a linear relationship between the electric resistance of CNT and the temperature is obtained. This result indicates that CNT can be used as a temperature sensor.

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Nano temperature sensor using selective lateral growth of carbon nanotube between electrodes

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