Nano temperature sensor using selective lateral growth of carbon nanotube between electrodes

C. Gau, C. L. Chan, S. H. Shiau, C. W. Liu, S. H. Ting

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

This paper presents lateral growth of carbon nano tube (CNT) between two electrodes and its use as nano temperature sensor. Fabrication of electrodes is made by MEMS techniques. The CNT is grown selectively by MPCVD between two electrodes. After wire bonding, the grown CNT is tested and calibrated. The growth conditions of CNT, such as the flow rate of CH4 or N 2 gas, are varied to obtain a high quality CNT sensor. SEM is used to observe the shape and structure of CNT, while Ramann spectrum analysis is used to indicate the degree of impurity and amorphrous structure in the CNT. The I-V curve of CNT is measured at different temperature, and a very linear relationship between the electric resistance of CNT and the temperature is obtained. This result indicates that CNT can be used as a very good temperature sensor.

Original languageEnglish
Title of host publication2005 5th IEEE Conference on Nanotechnology
PublisherIEEE Computer Society
Pages857-860
Number of pages4
ISBN (Print)0780391993, 9780780391994
DOIs
Publication statusPublished - 2005
Event2005 5th IEEE Conference on Nanotechnology - Nagoya, Japan
Duration: 2005 Jul 112005 Jul 15

Publication series

Name2005 5th IEEE Conference on Nanotechnology
Volume2

Other

Other2005 5th IEEE Conference on Nanotechnology
CountryJapan
CityNagoya
Period05-07-1105-07-15

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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