@inproceedings{376730cc7db24a0ab77c2a202f82c7f0,
title = "Nano temperature sensor using selective lateral growth of carbon nanotube between electrodes",
abstract = "This paper presents lateral growth of carbon nano tube (CNT) between two electrodes and its use as nano temperature sensor. Fabrication of electrodes is made by MEMS techniques. The CNT is grown selectively by MPCVD between two electrodes. After wire bonding, the grown CNT is tested and calibrated. The growth conditions of CNT, such as the flow rate of CH4 or N 2 gas, are varied to obtain a high quality CNT sensor. SEM is used to observe the shape and structure of CNT, while Ramann spectrum analysis is used to indicate the degree of impurity and amorphrous structure in the CNT. The I-V curve of CNT is measured at different temperature, and a very linear relationship between the electric resistance of CNT and the temperature is obtained. This result indicates that CNT can be used as a very good temperature sensor.",
author = "C. Gau and Chan, \{C. L.\} and Shiau, \{S. H.\} and Liu, \{C. W.\} and Ting, \{S. H.\}",
year = "2005",
doi = "10.1109/NANO.2005.1500668",
language = "English",
isbn = "0780391993",
series = "2005 5th IEEE Conference on Nanotechnology",
publisher = "IEEE Computer Society",
pages = "857--860",
booktitle = "2005 5th IEEE Conference on Nanotechnology",
address = "United States",
note = "2005 5th IEEE Conference on Nanotechnology ; Conference date: 11-07-2005 Through 15-07-2005",
}