Nanoscale control designs for systems

Research output: Contribution to journalReview articlepeer-review

1 Citation (Scopus)

Abstract

Nanoscale control is the science of the control of objects at dimensions with 100 nm or less & the manipulation of them at this level of precision. The desired attributes of systems under nanoscale control design are extreme high resolution, accuracy, stability, & fast response. An important perspective of investigation in nanoscale control design includes system modeling & precision control devices & materials at a nanoscale dimension, i.e., design of nanopositioners. Nanopositioners are mechatronic systems with an ultraprecise resolution down to a fraction of an atomic diameter & developed to move objects over a small range in nanoscale dimension. After reviewing a lot of existing literatures for nanoscale control designs, the way to successful nanoscale control is accurate position sensing & feedback control of the motion. An overview of nanoscale identification, linear, & nonlinear control technologies, & devices that are playing a key role in improving precision, accuracy, & response of operation of these systems are introduced in this research.

Original languageEnglish
Pages (from-to)1772-1789
Number of pages18
JournalJournal of Nanoscience and Nanotechnology
Volume14
Issue number2
DOIs
Publication statusPublished - 2014 Feb 1

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

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