Abstract
Nanoscale control is the science of the control of objects at dimensions with 100 nm or less & the manipulation of them at this level of precision. The desired attributes of systems under nanoscale control design are extreme high resolution, accuracy, stability, & fast response. An important perspective of investigation in nanoscale control design includes system modeling & precision control devices & materials at a nanoscale dimension, i.e., design of nanopositioners. Nanopositioners are mechatronic systems with an ultraprecise resolution down to a fraction of an atomic diameter & developed to move objects over a small range in nanoscale dimension. After reviewing a lot of existing literatures for nanoscale control designs, the way to successful nanoscale control is accurate position sensing & feedback control of the motion. An overview of nanoscale identification, linear, & nonlinear control technologies, & devices that are playing a key role in improving precision, accuracy, & response of operation of these systems are introduced in this research.
Original language | English |
---|---|
Pages (from-to) | 1772-1789 |
Number of pages | 18 |
Journal | Journal of Nanoscience and Nanotechnology |
Volume | 14 |
Issue number | 2 |
DOIs | |
Publication status | Published - 2014 Feb 1 |
All Science Journal Classification (ASJC) codes
- Bioengineering
- Chemistry(all)
- Biomedical Engineering
- Materials Science(all)
- Condensed Matter Physics