Nanoscale imaging of buried structures with elemental specificity using resonant X-ray diffraction microscopy

Changyong Song, Raymond Bergstrom, Damien Ramunno-Johnson, Huaidong Jiang, David Paterson, Martin D. De Jonge, Ian McNulty, Jooyoung Lee, Kang L. Wang, Jianwei Miao

Research output: Contribution to journalArticlepeer-review

59 Citations (Scopus)

Abstract

We report the first demonstration of resonant x-ray diffraction microscopy for element specific imaging of buried structures with a pixel resolution of ∼15nm by exploiting the abrupt change in the scattering cross section near electronic resonances. We performed nondestructive and quantitative imaging of buried Bi structures inside a Si crystal by directly phasing coherent x-ray diffraction patterns acquired below and above the Bi M5 edge. We anticipate that resonant x-ray diffraction microscopy will be applied to element and chemical state specific imaging of a broad range of systems including magnetic materials, semiconductors, organic materials, biominerals, and biological specimens.

Original languageEnglish
Article number025504
JournalPhysical review letters
Volume100
Issue number2
DOIs
Publication statusPublished - 2008 Jan 18

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Fingerprint

Dive into the research topics of 'Nanoscale imaging of buried structures with elemental specificity using resonant X-ray diffraction microscopy'. Together they form a unique fingerprint.

Cite this