Nanotransfer printing of plasmonic nano-pleat arrays with ultra-reduced nanocavity width using perfluoropolyether molds

Chia Ching Liang, Wen Huei Chang, Chun Hung Lin

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This study presents a novel process based on nanotransfer printing (NTP) for fabricating gold nano-pleat arrays. A gold film deposited over nano-ridge arrays on a perfluoropolyether (PFPE) mold was transferred directly to an NOA63 film on a glass substrate. The width of the nanocavities on the nano-pleat array can be dramatically reduced compared with the width of the nano-ridges on the mold, thus avoiding the difficulty of replicating extremely small nano-features. The mechanisms of remarkable reduction in the nanocavity width during the gold sputtering process were investigated. A nano-pleat array with a nanocavity width of 20 nm transferred from a PFPE mold with 80 nm features was successfully achieved. The plasmonic properties of the nano-pleat arrays were investigated numerically and experimentally. A sharp dip was found between two coupling modes in the measured spectrum, and its bandwidth was as small as 13.1 nm. Phase dip was used for refractive index sensing, demonstrating a good sensitivity of 525.5 nm per RIU with a figure of merit of 40.1. The proposed fabrication process only involved ion sputter coating of the gold film and one-step NTP. Thus, nano-pleat arrays are promising candidates for surface plasmon sensors.

Original languageEnglish
Pages (from-to)4491-4504
Number of pages14
JournalJournal of Materials Chemistry C
Volume4
Issue number20
DOIs
Publication statusPublished - 2016 Jan 1

Fingerprint

Molds
Gold
Printing
Sputtering
Refractive index
Ions
Bandwidth
Fabrication
Glass
Coatings
perfluoropolyether
Sensors
Substrates

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Chemistry

Cite this

@article{75a8ced655cf4a1bbc8fd6ee0b50f970,
title = "Nanotransfer printing of plasmonic nano-pleat arrays with ultra-reduced nanocavity width using perfluoropolyether molds",
abstract = "This study presents a novel process based on nanotransfer printing (NTP) for fabricating gold nano-pleat arrays. A gold film deposited over nano-ridge arrays on a perfluoropolyether (PFPE) mold was transferred directly to an NOA63 film on a glass substrate. The width of the nanocavities on the nano-pleat array can be dramatically reduced compared with the width of the nano-ridges on the mold, thus avoiding the difficulty of replicating extremely small nano-features. The mechanisms of remarkable reduction in the nanocavity width during the gold sputtering process were investigated. A nano-pleat array with a nanocavity width of 20 nm transferred from a PFPE mold with 80 nm features was successfully achieved. The plasmonic properties of the nano-pleat arrays were investigated numerically and experimentally. A sharp dip was found between two coupling modes in the measured spectrum, and its bandwidth was as small as 13.1 nm. Phase dip was used for refractive index sensing, demonstrating a good sensitivity of 525.5 nm per RIU with a figure of merit of 40.1. The proposed fabrication process only involved ion sputter coating of the gold film and one-step NTP. Thus, nano-pleat arrays are promising candidates for surface plasmon sensors.",
author = "Liang, {Chia Ching} and Chang, {Wen Huei} and Lin, {Chun Hung}",
year = "2016",
month = "1",
day = "1",
doi = "10.1039/c6tc00064a",
language = "English",
volume = "4",
pages = "4491--4504",
journal = "Journal of Materials Chemistry C",
issn = "2050-7526",
publisher = "Royal Society of Chemistry",
number = "20",

}

Nanotransfer printing of plasmonic nano-pleat arrays with ultra-reduced nanocavity width using perfluoropolyether molds. / Liang, Chia Ching; Chang, Wen Huei; Lin, Chun Hung.

In: Journal of Materials Chemistry C, Vol. 4, No. 20, 01.01.2016, p. 4491-4504.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Nanotransfer printing of plasmonic nano-pleat arrays with ultra-reduced nanocavity width using perfluoropolyether molds

AU - Liang, Chia Ching

AU - Chang, Wen Huei

AU - Lin, Chun Hung

PY - 2016/1/1

Y1 - 2016/1/1

N2 - This study presents a novel process based on nanotransfer printing (NTP) for fabricating gold nano-pleat arrays. A gold film deposited over nano-ridge arrays on a perfluoropolyether (PFPE) mold was transferred directly to an NOA63 film on a glass substrate. The width of the nanocavities on the nano-pleat array can be dramatically reduced compared with the width of the nano-ridges on the mold, thus avoiding the difficulty of replicating extremely small nano-features. The mechanisms of remarkable reduction in the nanocavity width during the gold sputtering process were investigated. A nano-pleat array with a nanocavity width of 20 nm transferred from a PFPE mold with 80 nm features was successfully achieved. The plasmonic properties of the nano-pleat arrays were investigated numerically and experimentally. A sharp dip was found between two coupling modes in the measured spectrum, and its bandwidth was as small as 13.1 nm. Phase dip was used for refractive index sensing, demonstrating a good sensitivity of 525.5 nm per RIU with a figure of merit of 40.1. The proposed fabrication process only involved ion sputter coating of the gold film and one-step NTP. Thus, nano-pleat arrays are promising candidates for surface plasmon sensors.

AB - This study presents a novel process based on nanotransfer printing (NTP) for fabricating gold nano-pleat arrays. A gold film deposited over nano-ridge arrays on a perfluoropolyether (PFPE) mold was transferred directly to an NOA63 film on a glass substrate. The width of the nanocavities on the nano-pleat array can be dramatically reduced compared with the width of the nano-ridges on the mold, thus avoiding the difficulty of replicating extremely small nano-features. The mechanisms of remarkable reduction in the nanocavity width during the gold sputtering process were investigated. A nano-pleat array with a nanocavity width of 20 nm transferred from a PFPE mold with 80 nm features was successfully achieved. The plasmonic properties of the nano-pleat arrays were investigated numerically and experimentally. A sharp dip was found between two coupling modes in the measured spectrum, and its bandwidth was as small as 13.1 nm. Phase dip was used for refractive index sensing, demonstrating a good sensitivity of 525.5 nm per RIU with a figure of merit of 40.1. The proposed fabrication process only involved ion sputter coating of the gold film and one-step NTP. Thus, nano-pleat arrays are promising candidates for surface plasmon sensors.

UR - http://www.scopus.com/inward/record.url?scp=84971283654&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84971283654&partnerID=8YFLogxK

U2 - 10.1039/c6tc00064a

DO - 10.1039/c6tc00064a

M3 - Article

AN - SCOPUS:84971283654

VL - 4

SP - 4491

EP - 4504

JO - Journal of Materials Chemistry C

JF - Journal of Materials Chemistry C

SN - 2050-7526

IS - 20

ER -