Nanotribology of amorphous hydrogenated carbon films using scanning probe microscopy

Te Hua Fang, Cheng I. Weng, Jee Gong Chang, Chi-Chuan Hwang

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Nanotribological characterization of amorphous hydrogenated carbon (a-C:H) films is performed by scanning probe microscopy. The a-C:H films are produced on silicon substrate by electron cyclotron resonance microwave plasma chemical vapor deposition (ECR-MPCVD). The influences of different percentages of hydrogen (H2) and methane (CH4) in the gas-discharge plasmas on the nanotribological characteristics are investigated. Scanning probe nanotribological tests, including the nano-friction, nano-wear and nano-scratch, are carried out. Large quantitative variations of the friction coefficient as well as the wear depth are found for different H2 content percentages in source gas. The results indicate that a higher H2 content in the source gas is beneficial to wear and scratch resistance, and produces a lower friction coefficient and that source gas H2 content plays an important role in the tribological characteristics of diamond-like films.

Original languageEnglish
Pages (from-to)167-173
Number of pages7
JournalThin Solid Films
Volume396
Issue number1-2
Publication statusPublished - 2001 Sep 21

Fingerprint

Nanotribology
Scanning probe microscopy
Carbon films
Gases
Wear of materials
Friction
microscopy
coefficient of friction
scanning
probes
carbon
gases
Plasma Gases
Diamond
Electron cyclotron resonance
Methane
gas discharges
Silicon
electron cyclotron resonance
diamond films

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Fang, Te Hua ; Weng, Cheng I. ; Chang, Jee Gong ; Hwang, Chi-Chuan. / Nanotribology of amorphous hydrogenated carbon films using scanning probe microscopy. In: Thin Solid Films. 2001 ; Vol. 396, No. 1-2. pp. 167-173.
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Nanotribology of amorphous hydrogenated carbon films using scanning probe microscopy. / Fang, Te Hua; Weng, Cheng I.; Chang, Jee Gong; Hwang, Chi-Chuan.

In: Thin Solid Films, Vol. 396, No. 1-2, 21.09.2001, p. 167-173.

Research output: Contribution to journalArticle

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AB - Nanotribological characterization of amorphous hydrogenated carbon (a-C:H) films is performed by scanning probe microscopy. The a-C:H films are produced on silicon substrate by electron cyclotron resonance microwave plasma chemical vapor deposition (ECR-MPCVD). The influences of different percentages of hydrogen (H2) and methane (CH4) in the gas-discharge plasmas on the nanotribological characteristics are investigated. Scanning probe nanotribological tests, including the nano-friction, nano-wear and nano-scratch, are carried out. Large quantitative variations of the friction coefficient as well as the wear depth are found for different H2 content percentages in source gas. The results indicate that a higher H2 content in the source gas is beneficial to wear and scratch resistance, and produces a lower friction coefficient and that source gas H2 content plays an important role in the tribological characteristics of diamond-like films.

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