New fabrication process for a flexible skin with temperature sensor array and its applications

Gwo Bin Lee, Fu Chun Huang, Chia Yen Lee, Jiun Jih Miau

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

A novel technique for fabrication of a flexible skin with a temperature sensor array (40×1 sensors) is reported. A simplified MEMS technology using platinum resistors as sensing materials, which are sandwiched between two polyimide layers as flexible substrates, is developed. The two polyimide layers are deposited on top of a thin aluminum layer, which serves as a sacrificial layer such that the flexible skin can be released by metal etching and peeled off easily. The flexible skin with a temperature sensor array has a high mechanical flexibility and can be handily attached on a highly curved surface to detect tiny temperature distribution inside a small area. The sensor array shows a linear output and has a sensitivity of 7.5 mV/°C (prior to amplifiers) at a drive current of 1 mA. Two examples have been employed to demonstrate its application, including measurement of temperature distribution around a micro heater of a micro PCR (polymerase chain reaction) chip for DNA amplification and detection of separation point for flow over a circular cylinder. The development of the flexible skin with a temperature sensor array may be crucial for measuring temperature distribution on any curved surface in the fields of aerodynamics, space exploration, auto making and biomedical applications etc.

Original languageEnglish
Pages (from-to)140-145
Number of pages6
JournalActa Mechanica Sinica/Lixue Xuebao
Volume20
Issue number2
Publication statusPublished - 2004 Apr 1

All Science Journal Classification (ASJC) codes

  • Computational Mechanics
  • Mechanical Engineering

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