New Transparent Bandpass Filter Using Aluminum Thin-Film Micromesh Structure

Tzu Chun Tai; Hung Wei Wu; Kuan Jen Lin; Cheng Yuan Hung; Yeong Her Wang

doi:10.1109/ACCESS.2019.2939954

New Transparent Bandpass Filter Using Aluminum Thin-Film Micromesh Structure

Tzu Chun Tai, Hung Wei Wu, Kuan Jen Lin, Cheng Yuan Hung, Yeong Her Wang

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

In this study, we present the new transparent coplanar waveguide (CPW) bandpass filter using aluminum (Al) thin film micromesh structure. The filter is prepared by the semiconductor process of dc sputtering and standard lift-off technology. In order to achieve the high-performance transparent bandpass filter, the new aluminum thin film micromesh structure with low resistivity to 10^-8Ω -cm, uniform Al thin film thickness to 3μm , high optical transparent to 78% and simple manufacturing process has been proposed. The transparent bandpass filter is designed at 2.4 GHz with 3-dB fractional bandwidth (FBW) of 5%, the minimum insertion loss (-20 log |S₂₁| ) of 1.8 dB and the return losses (-20 log |S₁₁| ) of 25 dB. The simulated and measured results of the transparent bandpass filter are in good agreement. The proposed transparent bandpass filter is showing a simple coplanar waveguide configuration, low thin film resistivity, high thin film transmittance, high filter performance, and small circuit size.

Original language	English
Article number	8827500
Pages (from-to)	130215-130220
Number of pages	6
Journal	IEEE Access
Volume	7
DOIs	https://doi.org/10.1109/ACCESS.2019.2939954
Publication status	Published - 2019

All Science Journal Classification (ASJC) codes

General Computer Science
General Materials Science
General Engineering

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10.1109/ACCESS.2019.2939954

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@article{87a81a75913f4926bbe34501e3511d42,

title = "New Transparent Bandpass Filter Using Aluminum Thin-Film Micromesh Structure",

abstract = "In this study, we present the new transparent coplanar waveguide (CPW) bandpass filter using aluminum (Al) thin film micromesh structure. The filter is prepared by the semiconductor process of dc sputtering and standard lift-off technology. In order to achieve the high-performance transparent bandpass filter, the new aluminum thin film micromesh structure with low resistivity to 10-8Ω -cm, uniform Al thin film thickness to 3μm , high optical transparent to 78% and simple manufacturing process has been proposed. The transparent bandpass filter is designed at 2.4 GHz with 3-dB fractional bandwidth (FBW) of 5%, the minimum insertion loss (-20 log |S21| ) of 1.8 dB and the return losses (-20 log |S11| ) of 25 dB. The simulated and measured results of the transparent bandpass filter are in good agreement. The proposed transparent bandpass filter is showing a simple coplanar waveguide configuration, low thin film resistivity, high thin film transmittance, high filter performance, and small circuit size.",

author = "Tai, {Tzu Chun} and Wu, {Hung Wei} and Lin, {Kuan Jen} and Hung, {Cheng Yuan} and Wang, {Yeong Her}",

note = "Funding Information: This work was supported in part by the Ministry of Science and Technology under Contract 107-2622-E-168 -002-CC3 and Contract 107-2221-E-168 -012-MY2. Publisher Copyright: {\textcopyright} 2013 IEEE.",

year = "2019",

doi = "10.1109/ACCESS.2019.2939954",

language = "English",

volume = "7",

pages = "130215--130220",

journal = "IEEE Access",

issn = "2169-3536",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - JOUR

T1 - New Transparent Bandpass Filter Using Aluminum Thin-Film Micromesh Structure

AU - Tai, Tzu Chun

AU - Wu, Hung Wei

AU - Lin, Kuan Jen

AU - Hung, Cheng Yuan

AU - Wang, Yeong Her

N1 - Funding Information: This work was supported in part by the Ministry of Science and Technology under Contract 107-2622-E-168 -002-CC3 and Contract 107-2221-E-168 -012-MY2. Publisher Copyright: © 2013 IEEE.

PY - 2019

Y1 - 2019

N2 - In this study, we present the new transparent coplanar waveguide (CPW) bandpass filter using aluminum (Al) thin film micromesh structure. The filter is prepared by the semiconductor process of dc sputtering and standard lift-off technology. In order to achieve the high-performance transparent bandpass filter, the new aluminum thin film micromesh structure with low resistivity to 10-8Ω -cm, uniform Al thin film thickness to 3μm , high optical transparent to 78% and simple manufacturing process has been proposed. The transparent bandpass filter is designed at 2.4 GHz with 3-dB fractional bandwidth (FBW) of 5%, the minimum insertion loss (-20 log |S21| ) of 1.8 dB and the return losses (-20 log |S11| ) of 25 dB. The simulated and measured results of the transparent bandpass filter are in good agreement. The proposed transparent bandpass filter is showing a simple coplanar waveguide configuration, low thin film resistivity, high thin film transmittance, high filter performance, and small circuit size.

AB - In this study, we present the new transparent coplanar waveguide (CPW) bandpass filter using aluminum (Al) thin film micromesh structure. The filter is prepared by the semiconductor process of dc sputtering and standard lift-off technology. In order to achieve the high-performance transparent bandpass filter, the new aluminum thin film micromesh structure with low resistivity to 10-8Ω -cm, uniform Al thin film thickness to 3μm , high optical transparent to 78% and simple manufacturing process has been proposed. The transparent bandpass filter is designed at 2.4 GHz with 3-dB fractional bandwidth (FBW) of 5%, the minimum insertion loss (-20 log |S21| ) of 1.8 dB and the return losses (-20 log |S11| ) of 25 dB. The simulated and measured results of the transparent bandpass filter are in good agreement. The proposed transparent bandpass filter is showing a simple coplanar waveguide configuration, low thin film resistivity, high thin film transmittance, high filter performance, and small circuit size.

UR - http://www.scopus.com/inward/record.url?scp=85077770628&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85077770628&partnerID=8YFLogxK

U2 - 10.1109/ACCESS.2019.2939954

DO - 10.1109/ACCESS.2019.2939954

M3 - Article

AN - SCOPUS:85077770628

SN - 2169-3536

VL - 7

SP - 130215

EP - 130220

JO - IEEE Access

JF - IEEE Access

M1 - 8827500

ER -

New Transparent Bandpass Filter Using Aluminum Thin-Film Micromesh Structure

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All Science Journal Classification (ASJC) codes

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