Nitrogen-incorporated ultrananocrystalline diamond and multi-layer- graphene-like hybrid carbon films

Yonhua Tzeng, Shoupu Yeh, Wei Cheng Fang, Yuehchieh Chu

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

Nitrogen-incorporated ultrananocrystalline diamond (N-UNCD) and multi-layer-graphene-like hybrid carbon films have been synthesized by microwave plasma enhanced chemical vapor deposition (MPECVD) on oxidized silicon which is pre-seeded with diamond nanoparticles. MPECVD of N-UNCD on nanodiamond seeds produces a base layer, from which carbon structures nucleate and grow perpendicularly to form standing carbon platelets. High-resolution transmission electron microscopy and Raman scattering measurements reveal that these carbon platelets are comprised of ultrananocrystalline diamond embedded in multilayer-graphene-like carbon structures. The hybrid carbon films are of low electrical resistivity. UNCD grains in the N-UNCD base layer and the hybrid carbon platelets serve as high-density diamond nuclei for the deposition of an electrically insulating UNCD film on it. Biocompatible carbon-based heaters made of low-resistivity hybrid carbon heaters encapsulated by insulating UNCD for possible electrosurgical applications have been demonstrated.

Original languageEnglish
Article number4531
JournalScientific reports
Volume4
DOIs
Publication statusPublished - 2014 Mar 31

All Science Journal Classification (ASJC) codes

  • General

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