Nitrogen Oxide (NO2) Gas Sensing Performance of ZnO Nanoparticles (NPs)/Sapphire-Based Sensors

Po Cheng Chou, Huey Ing Chen, I. Ping Liu, Chun Chia Chen, Jian Kai Liou, Cheng Jing Lai, Wen Chau Liu

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7 Citations (Scopus)

Abstract

The interesting ZnO nanoparticles (NPs)-based sensor devices are fabricated on sapphire substrates to study the nitrogen oxide (NO2) gas sensing performance. The postheat treatment process is not used to avoid the undesired agglomeration phenomenon. Different concentrations (0.1 and 0.01 wt%) of ZnO NPs are employed to produce the studied NO2 gas sensors. Experimentally, studied devices demonstrate good NO2 sensing responses ∼100 (at 5 ppm NO2/air, 473 K). Especially, an extremely low sensing limit of 10 ppb NO2/air is obtained for the studied devices. This value is superior to those of previously reported results from other NO2 sensors. The studied sensor devices also show the advantages of low cost, easy fabrication, and compact potentiality to integrate with other high-speed and optoelectronic devices. Therefore, the studied devices give the promise for high-performance NO2 monitoring applications.

Original languageEnglish
Article number7050338
Pages (from-to)3759-3763
Number of pages5
JournalIEEE Sensors Journal
Volume15
Issue number7
DOIs
Publication statusPublished - 2015 Jul 1

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All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

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