Nitrogen Oxide (NO2) Gas Sensing Performance of ZnO Nanoparticles (NPs)/Sapphire-Based Sensors

Po Cheng Chou; Huey Ing Chen; I. Ping Liu; Chun Chia Chen; Jian Kai Liou; Cheng Jing Lai; Wen Chau Liu

doi:10.1109/JSEN.2015.2391271

Nitrogen Oxide (NO₂) Gas Sensing Performance of ZnO Nanoparticles (NPs)/Sapphire-Based Sensors

Po Cheng Chou, Huey Ing Chen, I. Ping Liu, Chun Chia Chen, Jian Kai Liou, Cheng Jing Lai, Wen Chau Liu

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

The interesting ZnO nanoparticles (NPs)-based sensor devices are fabricated on sapphire substrates to study the nitrogen oxide (NO₂) gas sensing performance. The postheat treatment process is not used to avoid the undesired agglomeration phenomenon. Different concentrations (0.1 and 0.01 wt%) of ZnO NPs are employed to produce the studied NO₂ gas sensors. Experimentally, studied devices demonstrate good NO₂ sensing responses ∼100 (at 5 ppm NO₂/air, 473 K). Especially, an extremely low sensing limit of 10 ppb NO₂/air is obtained for the studied devices. This value is superior to those of previously reported results from other NO₂ sensors. The studied sensor devices also show the advantages of low cost, easy fabrication, and compact potentiality to integrate with other high-speed and optoelectronic devices. Therefore, the studied devices give the promise for high-performance NO₂ monitoring applications.

Original language	English
Article number	7050338
Pages (from-to)	3759-3763
Number of pages	5
Journal	IEEE Sensors Journal
Volume	15
Issue number	7
DOIs	https://doi.org/10.1109/JSEN.2015.2391271
Publication status	Published - 2015 Jul 1

All Science Journal Classification (ASJC) codes

Instrumentation
Electrical and Electronic Engineering

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title = "Nitrogen Oxide (NO2) Gas Sensing Performance of ZnO Nanoparticles (NPs)/Sapphire-Based Sensors",

abstract = "The interesting ZnO nanoparticles (NPs)-based sensor devices are fabricated on sapphire substrates to study the nitrogen oxide (NO2) gas sensing performance. The postheat treatment process is not used to avoid the undesired agglomeration phenomenon. Different concentrations (0.1 and 0.01 wt%) of ZnO NPs are employed to produce the studied NO2 gas sensors. Experimentally, studied devices demonstrate good NO2 sensing responses ∼100 (at 5 ppm NO2/air, 473 K). Especially, an extremely low sensing limit of 10 ppb NO2/air is obtained for the studied devices. This value is superior to those of previously reported results from other NO2 sensors. The studied sensor devices also show the advantages of low cost, easy fabrication, and compact potentiality to integrate with other high-speed and optoelectronic devices. Therefore, the studied devices give the promise for high-performance NO2 monitoring applications.",

author = "Chou, {Po Cheng} and Chen, {Huey Ing} and Liu, {I. Ping} and Chen, {Chun Chia} and Liou, {Jian Kai} and Lai, {Cheng Jing} and Liu, {Wen Chau}",

year = "2015",

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doi = "10.1109/JSEN.2015.2391271",

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AU - Chou, Po Cheng

AU - Chen, Huey Ing

AU - Liu, I. Ping

AU - Chen, Chun Chia

AU - Liou, Jian Kai

AU - Lai, Cheng Jing

AU - Liu, Wen Chau

PY - 2015/7/1

Y1 - 2015/7/1

N2 - The interesting ZnO nanoparticles (NPs)-based sensor devices are fabricated on sapphire substrates to study the nitrogen oxide (NO2) gas sensing performance. The postheat treatment process is not used to avoid the undesired agglomeration phenomenon. Different concentrations (0.1 and 0.01 wt%) of ZnO NPs are employed to produce the studied NO2 gas sensors. Experimentally, studied devices demonstrate good NO2 sensing responses ∼100 (at 5 ppm NO2/air, 473 K). Especially, an extremely low sensing limit of 10 ppb NO2/air is obtained for the studied devices. This value is superior to those of previously reported results from other NO2 sensors. The studied sensor devices also show the advantages of low cost, easy fabrication, and compact potentiality to integrate with other high-speed and optoelectronic devices. Therefore, the studied devices give the promise for high-performance NO2 monitoring applications.

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Nitrogen Oxide (NO₂) Gas Sensing Performance of ZnO Nanoparticles (NPs)/Sapphire-Based Sensors

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