Non-contact monitoring of Ge and B diffusion in B-doped epitaxial Si 1-xGex bi-layers on silicon substrates during rapid thermal annealing by multiwavelength Raman spectroscopy

  • Min Hao Hong
  • , Chun Wei Chang
  • , Dung Ching Perng
  • , Kuan Ching Lee
  • , Shiu Ko Jang Jian
  • , Wei Fan Lee
  • , Yen Chuang
  • , Yu Ta Fan
  • , Woo Sik Yoo

Research output: Contribution to journal › Article › peer-review

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