Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

Tung Hsien Hsieh; Wen Yuh Jywe; Shang-Liang Chen; Chien Hung Liu; Hsueh Liang Huang

doi:10.1063/1.3585021

Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

Tung Hsien Hsieh, Wen Yuh Jywe, Shang-Liang Chen, Chien Hung Liu, Hsueh Liang Huang

Institute of Manufacturing Information and Systems

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz.

Original language	English
Article number	056101
Journal	Review of Scientific Instruments
Volume	82
Issue number	5
DOIs	https://doi.org/10.1063/1.3585021
Publication status	Published - 2011 May 1

All Science Journal Classification (ASJC) codes

Instrumentation

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10.1063/1.3585021

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abstract = "A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz.",

author = "Hsieh, {Tung Hsien} and Jywe, {Wen Yuh} and Shang-Liang Chen and Liu, {Chien Hung} and Huang, {Hsueh Liang}",

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AU - Jywe, Wen Yuh

AU - Chen, Shang-Liang

AU - Liu, Chien Hung

AU - Huang, Hsueh Liang

PY - 2011/5/1

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N2 - A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz.

AB - A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz.

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