Abstract
A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz.
| Original language | English |
|---|---|
| Article number | 056101 |
| Journal | Review of Scientific Instruments |
| Volume | 82 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 2011 May 1 |
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All Science Journal Classification (ASJC) codes
- Instrumentation
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Note : Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage. / Hsieh, Tung Hsien; Jywe, Wen Yuh; Chen, Shang-Liang; Liu, Chien Hung; Huang, Hsueh Liang.
In: Review of Scientific Instruments, Vol. 82, No. 5, 056101, 01.05.2011.Research output: Contribution to journal › Article
TY - JOUR
T1 - Note
T2 - Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage
AU - Hsieh, Tung Hsien
AU - Jywe, Wen Yuh
AU - Chen, Shang-Liang
AU - Liu, Chien Hung
AU - Huang, Hsueh Liang
PY - 2011/5/1
Y1 - 2011/5/1
N2 - A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz.
AB - A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz.
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U2 - 10.1063/1.3585021
DO - 10.1063/1.3585021
M3 - Article
VL - 82
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
SN - 0034-6748
IS - 5
M1 - 056101
ER -