Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

Tung Hsien Hsieh, Wen Yuh Jywe, Shang-Liang Chen, Chien Hung Liu, Hsueh Liang Huang

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz.

Original languageEnglish
Article number056101
JournalReview of Scientific Instruments
Volume82
Issue number5
DOIs
Publication statusPublished - 2011 May 1

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vibration meters
Time measurement
degrees of freedom
high resolution
Experiments
time measurement
vibration

All Science Journal Classification (ASJC) codes

  • Instrumentation

Cite this

Hsieh, Tung Hsien ; Jywe, Wen Yuh ; Chen, Shang-Liang ; Liu, Chien Hung ; Huang, Hsueh Liang. / Note : Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage. In: Review of Scientific Instruments. 2011 ; Vol. 82, No. 5.
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Note : Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage. / Hsieh, Tung Hsien; Jywe, Wen Yuh; Chen, Shang-Liang; Liu, Chien Hung; Huang, Hsueh Liang.

In: Review of Scientific Instruments, Vol. 82, No. 5, 056101, 01.05.2011.

Research output: Contribution to journalArticle

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