Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

Tung Hsien Hsieh, Wen Yuh Jywe, Shang-Liang Chen, Chien Hung Liu, Hsueh Liang Huang

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz.

Original languageEnglish
Article number056101
JournalReview of Scientific Instruments
Volume82
Issue number5
DOIs
Publication statusPublished - 2011 May 1

All Science Journal Classification (ASJC) codes

  • Instrumentation

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