@inproceedings{321502a21141404e9236699e7f9701fe,
title = "Novel 140°C hybrid thin film solar cell/transistor technology with 9.6% conversion efficiency and 1.1 cm2/V-s electron mobility for low-temperature substrates",
abstract = "For the first time, we report a low temperature silicon thin film deposition technology using high density plasma for high performance and low cost solar cells with embedded transistor modules. For process temperature at 140°C, energy conversion efficiency of 9.6% and electron mobility of 1.1 cm2/V-s have been achieved. Device performance with process temperature down to 90°C and 60°C has also been examined in depth. This very low process temperature technology can integrate energy harvesting with electronics on inexpensive and flexible substrates.",
author = "Shen, {Chang Hong} and Shieh, {Jia Min} and Kuo, {Hao Chung} and Huang, {Jung Y.} and Huang, {Wen Hsien} and Hsu, {Chih Wei} and Lin, {Yu Hsin} and Chiu, {Hung Yu} and Jhan, {Huang Yan} and Dai, {Bau Tong} and Lee, {Ching Ting} and Pan, {Ci Ling} and Chenming Hu and Yang, {Fu Liang}",
year = "2010",
doi = "10.1109/IEDM.2010.5703455",
language = "English",
isbn = "9781424474196",
series = "Technical Digest - International Electron Devices Meeting, IEDM",
pages = "31.1.1--31.1.4",
booktitle = "2010 IEEE International Electron Devices Meeting, IEDM 2010",
note = "2010 IEEE International Electron Devices Meeting, IEDM 2010 ; Conference date: 06-12-2010 Through 08-12-2010",
}