Novel automatic offset cancellation approach for capacitive CMOS MEMS accelerometers

Po Chang Wu, Bin-Da Liu, Yu Chen Teng, Chih Yuan Yeh, Sheng Hsiang Tseng, Hann Huei Tsai, Ying Zong Juang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A monolithic inertial sensor based automatic offset calibration technique is proposed in this paper. With this technique, the output offset voltage caused by sensor and amplifier mismatches is trimmed from 600mV down to 50mV from the measurement results. For providing larger dynamic range, a programmable gain control amplifier is included in this architecture. This inertial sensor is implemented by the 0.18μm CMOS MEMS process and the total chip area is 1.3 × 1.3 mm2.

Original languageEnglish
Title of host publication2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013
Pages147-148
Number of pages2
DOIs
Publication statusPublished - 2013 Sep 11
Event2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013 - Hsinchu, Taiwan
Duration: 2013 Jun 32013 Jun 6

Publication series

NameProceedings of the International Symposium on Consumer Electronics, ISCE

Other

Other2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013
CountryTaiwan
CityHsinchu
Period13-06-0313-06-06

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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