Novel automatic offset cancellation approach for capacitive CMOS MEMS accelerometers

Po Chang Wu; Bin-Da Liu; Yu Chen Teng; Chih Yuan Yeh; Sheng Hsiang Tseng; Hann Huei Tsai; Ying Zong Juang

doi:10.1109/ISCE.2013.6570154

Novel automatic offset cancellation approach for capacitive CMOS MEMS accelerometers

Po Chang Wu, Bin-Da Liu, Yu Chen Teng, Chih Yuan Yeh, Sheng Hsiang Tseng, Hann Huei Tsai, Ying Zong Juang

Department of Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

A monolithic inertial sensor based automatic offset calibration technique is proposed in this paper. With this technique, the output offset voltage caused by sensor and amplifier mismatches is trimmed from 600mV down to 50mV from the measurement results. For providing larger dynamic range, a programmable gain control amplifier is included in this architecture. This inertial sensor is implemented by the 0.18μm CMOS MEMS process and the total chip area is 1.3 × 1.3 mm².

Original language	English
Title of host publication	2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013
Pages	147-148
Number of pages	2
DOIs	https://doi.org/10.1109/ISCE.2013.6570154
Publication status	Published - 2013 Sept 11
Event	2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013 - Hsinchu, Taiwan Duration: 2013 Jun 3 → 2013 Jun 6

Publication series

Name	Proceedings of the International Symposium on Consumer Electronics, ISCE

Other

Other	2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013
Country/Territory	Taiwan
City	Hsinchu
Period	13-06-03 → 13-06-06

All Science Journal Classification (ASJC) codes

General Engineering

Access to Document

10.1109/ISCE.2013.6570154

Cite this

Wu, P. C., Liu, B.-D., Teng, Y. C., Yeh, C. Y., Tseng, S. H., Tsai, H. H., & Juang, Y. Z. (2013). Novel automatic offset cancellation approach for capacitive CMOS MEMS accelerometers. In 2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013 (pp. 147-148). Article 6570154 (Proceedings of the International Symposium on Consumer Electronics, ISCE). https://doi.org/10.1109/ISCE.2013.6570154

@inproceedings{cad497a662a34bd5b4c5cd81ffe6e3bc,

title = "Novel automatic offset cancellation approach for capacitive CMOS MEMS accelerometers",

abstract = "A monolithic inertial sensor based automatic offset calibration technique is proposed in this paper. With this technique, the output offset voltage caused by sensor and amplifier mismatches is trimmed from 600mV down to 50mV from the measurement results. For providing larger dynamic range, a programmable gain control amplifier is included in this architecture. This inertial sensor is implemented by the 0.18μm CMOS MEMS process and the total chip area is 1.3 × 1.3 mm2.",

author = "Wu, {Po Chang} and Bin-Da Liu and Teng, {Yu Chen} and Yeh, {Chih Yuan} and Tseng, {Sheng Hsiang} and Tsai, {Hann Huei} and Juang, {Ying Zong}",

year = "2013",

month = sep,

day = "11",

doi = "10.1109/ISCE.2013.6570154",

language = "English",

isbn = "9781467361996",

series = "Proceedings of the International Symposium on Consumer Electronics, ISCE",

pages = "147--148",

booktitle = "2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013",

note = "2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013 ; Conference date: 03-06-2013 Through 06-06-2013",

}

Wu, PC, Liu, B-D, Teng, YC, Yeh, CY, Tseng, SH, Tsai, HH & Juang, YZ 2013, Novel automatic offset cancellation approach for capacitive CMOS MEMS accelerometers. in 2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013., 6570154, Proceedings of the International Symposium on Consumer Electronics, ISCE, pp. 147-148, 2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013, Hsinchu, Taiwan, 13-06-03. https://doi.org/10.1109/ISCE.2013.6570154

Novel automatic offset cancellation approach for capacitive CMOS MEMS accelerometers. / Wu, Po Chang; Liu, Bin-Da; Teng, Yu Chen et al.
2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013. 2013. p. 147-148 6570154 (Proceedings of the International Symposium on Consumer Electronics, ISCE).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Wu, Po Chang

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AU - Tsai, Hann Huei

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N2 - A monolithic inertial sensor based automatic offset calibration technique is proposed in this paper. With this technique, the output offset voltage caused by sensor and amplifier mismatches is trimmed from 600mV down to 50mV from the measurement results. For providing larger dynamic range, a programmable gain control amplifier is included in this architecture. This inertial sensor is implemented by the 0.18μm CMOS MEMS process and the total chip area is 1.3 × 1.3 mm2.

AB - A monolithic inertial sensor based automatic offset calibration technique is proposed in this paper. With this technique, the output offset voltage caused by sensor and amplifier mismatches is trimmed from 600mV down to 50mV from the measurement results. For providing larger dynamic range, a programmable gain control amplifier is included in this architecture. This inertial sensor is implemented by the 0.18μm CMOS MEMS process and the total chip area is 1.3 × 1.3 mm2.

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BT - 2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013

T2 - 2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013

Y2 - 3 June 2013 through 6 June 2013

ER -

Novel automatic offset cancellation approach for capacitive CMOS MEMS accelerometers

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