TY - GEN
T1 - Novel bonding technique using hydrophilic SU-8
AU - Chen, Yu Tzu
AU - Lee, Denz
N1 - Funding Information:
This study was partially sponsored by the National Science Council of Taiwan under the project NSC 94-2213-E-006-002.
Funding Information:
This study was partially sponsored by the National Science Council of Taiwan under the
Publisher Copyright:
© 2007 CBMS.
PY - 2007
Y1 - 2007
N2 - This paper presents a novel bonding technique for fabricating microfluidic devices with surfactant-added SU-8 (hydrophilic SU-8) as structure. The technique is based on an adhesive wafer bonding process. The hydrophilic SU-8 plays the roles of adhesive layer as well as structural layer. Due to its special feature, the layer can be directly bonded to various substrates (glass, silicon or poly(dimethylsiloxane)) after oxygen plasma treatment. The present bonding technique does not need another SU-8 adhesive layer for bonding. Neither is an expensive bonding system needed. The technique is fast, convenient, secure and inexpensive with standard photolithography.
AB - This paper presents a novel bonding technique for fabricating microfluidic devices with surfactant-added SU-8 (hydrophilic SU-8) as structure. The technique is based on an adhesive wafer bonding process. The hydrophilic SU-8 plays the roles of adhesive layer as well as structural layer. Due to its special feature, the layer can be directly bonded to various substrates (glass, silicon or poly(dimethylsiloxane)) after oxygen plasma treatment. The present bonding technique does not need another SU-8 adhesive layer for bonding. Neither is an expensive bonding system needed. The technique is fast, convenient, secure and inexpensive with standard photolithography.
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M3 - Conference contribution
AN - SCOPUS:85088675836
T3 - Proceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007
SP - 1119
EP - 1121
BT - Proceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007
A2 - Viovy, Jean-Louis
A2 - Tabeling, Patrick
A2 - Descroix, Stephanie
A2 - Malaquin, Laurent
PB - Chemical and Biological Microsystems Society
T2 - 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007
Y2 - 7 October 2007 through 11 October 2007
ER -