@inproceedings{494020a62d5646c38e2acbf908fc408c,
title = "Novel fast laser-based auto-focusing microscope",
abstract = "In keeping with consumer preferences for ever more high-performance products, a requirement exists for precise and fast auto-focusing microscope systems for the inspection processes in mass production lines. Accordingly, the present study proposes a precise and fast laser-based auto-focusing microscope system in which an auto-focusing capability is achieved by using a position feedback signal from the centroid of the image of the reflected laser beam captured from a CCD sensor. The experimental results show that the proposed auto-focusing microscope system is under a 1 s cycle time and ±3 μm positioning accuracy with a ±500 μm linear working range. Overall, it is shown that the proposed auto-focusing microscope system has both a fast response and high positioning accuracy.",
author = "Liu, {Chien Sheng} and Hu, {Pin Hao} and Wang, {Yung Hsing} and Ke, {Shun Sheng} and Lin, {Yang Cheng} and Chang, {Yu Hsiu} and Horng, {Ji Bin}",
year = "2010",
month = dec,
day = "1",
doi = "10.1109/ICSENS.2010.5690153",
language = "English",
isbn = "9781424481682",
series = "Proceedings of IEEE Sensors",
pages = "481--485",
booktitle = "IEEE Sensors 2010 Conference, SENSORS 2010",
note = "9th IEEE Sensors Conference 2010, SENSORS 2010 ; Conference date: 01-11-2010 Through 04-11-2010",
}