Novel fast laser-based auto-focusing microscope

Chien Sheng Liu, Pin Hao Hu, Yung Hsing Wang, Shun Sheng Ke, Yang Cheng Lin, Yu Hsiu Chang, Ji Bin Horng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

In keeping with consumer preferences for ever more high-performance products, a requirement exists for precise and fast auto-focusing microscope systems for the inspection processes in mass production lines. Accordingly, the present study proposes a precise and fast laser-based auto-focusing microscope system in which an auto-focusing capability is achieved by using a position feedback signal from the centroid of the image of the reflected laser beam captured from a CCD sensor. The experimental results show that the proposed auto-focusing microscope system is under a 1 s cycle time and ±3 μm positioning accuracy with a ±500 μm linear working range. Overall, it is shown that the proposed auto-focusing microscope system has both a fast response and high positioning accuracy.

Original languageEnglish
Title of host publicationIEEE Sensors 2010 Conference, SENSORS 2010
Pages481-485
Number of pages5
DOIs
Publication statusPublished - 2010 Dec 1
Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
Duration: 2010 Nov 12010 Nov 4

Publication series

NameProceedings of IEEE Sensors

Other

Other9th IEEE Sensors Conference 2010, SENSORS 2010
CountryUnited States
CityWaikoloa, HI
Period10-11-0110-11-04

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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