Novel polymeric thin film deposition system: Injector-apparatus/PECVD reactor

Mario J. Cazeca, Changshu Kuo, Jayant Kumar

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint Dive into the research topics of 'Novel polymeric thin film deposition system: Injector-apparatus/PECVD reactor'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science