Novel Reliability Mechanism of Quasi Reaction-Diffusion Model for PBTI in n-channel HfO2 LTPS-TFTs with Dual Plasma Treatment

Chien Hung Wu, Bo Wen Huang, Kow Ming Chang, Ting Chia Chang, Lin Sheng-Chia , Jian Hong Lin, Shui-Jinn Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationThe 11th International Thin Film Transistor Conference
Place of PublicationRennes, France
Publication statusPublished - 2015 Feb 27

Cite this