Novel Reliability Mechanism of Quasi Reaction-Diffusion Model for PBTI in n-channel HfO2 LTPS-TFTs with Dual Plasma Treatment

Chien Hung Wu; Bo Wen Huang; Kow Ming Chang; Ting Chia Chang; Lin Sheng-Chia; Jian Hong Lin; Shui-Jinn Wang

Novel Reliability Mechanism of Quasi Reaction-Diffusion Model for PBTI in n-channel HfO2 LTPS-TFTs with Dual Plasma Treatment

Chien Hung Wu, Bo Wen Huang, Kow Ming Chang, Ting Chia Chang, Lin Sheng-Chia , Jian Hong Lin, Shui-Jinn Wang

Institute of Microelectronics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	The 11th International Thin Film Transistor Conference
Place of Publication	Rennes, France
Publication status	Published - 2015 Feb 27

Cite this

Wu, C. H., Huang, B. W., Chang, K. M., Chang, T. C., Sheng-Chia , L., Lin, J. H., & Wang, S-J. (2015). Novel Reliability Mechanism of Quasi Reaction-Diffusion Model for PBTI in n-channel HfO2 LTPS-TFTs with Dual Plasma Treatment. In The 11th International Thin Film Transistor Conference

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title = "Novel Reliability Mechanism of Quasi Reaction-Diffusion Model for PBTI in n-channel HfO2 LTPS-TFTs with Dual Plasma Treatment",

author = "Wu, {Chien Hung} and Huang, {Bo Wen} and Chang, {Kow Ming} and Chang, {Ting Chia} and Lin Sheng-Chia and Lin, {Jian Hong} and Shui-Jinn Wang",

year = "2015",

month = feb,

day = "27",

language = "English",

booktitle = "The 11th International Thin Film Transistor Conference",

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Novel Reliability Mechanism of Quasi Reaction-Diffusion Model for PBTI in n-channel HfO2 LTPS-TFTs with Dual Plasma Treatment. / Wu, Chien Hung; Huang, Bo Wen; Chang, Kow Ming; Chang, Ting Chia; Sheng-Chia , Lin; Lin, Jian Hong; Wang, Shui-Jinn.

The 11th International Thin Film Transistor Conference. Rennes, France, 2015.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Novel Reliability Mechanism of Quasi Reaction-Diffusion Model for PBTI in n-channel HfO2 LTPS-TFTs with Dual Plasma Treatment

AU - Wu, Chien Hung

AU - Huang, Bo Wen

AU - Chang, Kow Ming

AU - Chang, Ting Chia

AU - Sheng-Chia , Lin

AU - Lin, Jian Hong

AU - Wang, Shui-Jinn

PY - 2015/2/27

Y1 - 2015/2/27

M3 - Conference contribution

BT - The 11th International Thin Film Transistor Conference

CY - Rennes, France

ER -