Novel spatially coordinated in-situ Raman and nanoscale wear analysis of FCVA-deposited DLC film

Mehdi Rouhani, Jonathan Hobley, Franklin Chau Nan Hong, Yeau Ren Jeng

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Abstract

A novel combined in-situ system, integrating Raman spectroscopy and depth-sensing techniques, was applied to analyze the wear induced transformation on the microstructure of diamond-like carbon (DLC) film deposited on Si substrates using a filtered cathodic arc vacuum (FCVA) deposition system. Using this synchronized characterization technique it was demonstrated that upon wear-induced removal of upper surface layers, the intensity ratio (ID/IG) for the area inside wear tracks decreases. On the other hand, while the peak position for the D line (PD) shifts to higher wavenumbers, the peak position for the G line (PG) shifts to lower wavenumbers. The coefficient of friction shows significant reduction upon increasing the depth of the wear tracks. These results confirm our previous preliminary report on the possible existence of layers rich in sp2 in the surface region. It was also shown that the wear debris is more graphitized.

Original languageEnglish
Article number065215
JournalAIP Advances
Volume9
Issue number6
DOIs
Publication statusPublished - 2019 Jun 1

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All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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