Numerical method to predict and fabricate aspherical microlens arrays using 248-nm excimer laser ablation

C. T. Pan, S. C. Shen, Chi Chang Hsieh, Chi Hui Chien, Yung Chang Chen

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A method of numerical simulations is used to predict the profile of a 3-D aspherical microlens array. Based on the simulated results, the desired micro-optical lens profile is obtained through excimer laser ablation. The simulation method applied in the excimer laser ablation can significantly reduce the quantity of microablation experiments. The ablated microstructures with surface average roughness of Ra<20 nm are successfully achieved for micro-optical components. The excimer laser ablation parameters include laser fluence, shot number, workstation scanning velocity, and repetition rate. Various profiles of microlens and microprism arrays with different dimensions can utilize numerical simulation and form desired geometries by laser ablation.

Original languageEnglish
Pages (from-to)555-562
Number of pages8
JournalJournal of Microlithography, Microfabrication and Microsystems
Volume3
Issue number4
DOIs
Publication statusPublished - 2004 Oct 1

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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