Numerical simulation of electromagnetic actuator for impedance pumping

Chia Yen Lee, Chang Hsien Tai, Chin Lung Chang, Chien Hsiung Tsai, Yao Nan Wang, Lung Ming Fu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)


This study designs and analyzes an impedance pump utilizing an electromagnetic actuator. The pump is designed to have three major components, namely a lower glass substrate patterned with a copper micro-coil, a microchannel, and an upper glass cover plate attached a magnetic PDMS diaphragm. When a current is passed through the micro-coil, an electromagnetic force is established between the coil and the magnetic diaphragm. The resulting deflection of the PDMS diaphragm creates an acoustic impedance mismatch within the microchannel, which results in a net flow. Overall, the simulated results reveal that a net flow rate of 52.8 μl/min can be obtained using a diaphragm displacement of 31.5 μm induced by a micro-coil input current of 0.5 A. The impedance pump proposed in this study provides a valuable contribution to the ongoing development of Lab-on-Chips (LoCs) systems.

Original languageEnglish
Title of host publicationMEMS/NEMS Nano Technology
PublisherTrans Tech Publications Ltd
Number of pages6
ISBN (Print)9783037851753
Publication statusPublished - 2011

Publication series

NameKey Engineering Materials
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering


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