Off-plane diffraction of extreme ultraviolet light caused by line width roughness

Wen Yu Chen; Chun Hung Lin

doi:10.1016/j.tsf.2012.09.008

Off-plane diffraction of extreme ultraviolet light caused by line width roughness

Wen Yu Chen, Chun Hung Lin

Department of Photonics

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

A simple and fast method using extreme ultraviolet off-plane scatterometry for in-line line width roughness (LWR) metrology is proposed. The effect of line roughness on diffraction is numerically investigated. LWR diffracts light into the off-plane of the incidence direction, thereby causing a decrement in specular reflection. The amplitude of LWR can be quantified by detecting the decrement of the specular reflection. The angular distribution of m = 0 and n ≠ 0 diffraction orders is related to the LWR spectrum. LWR spectral analysis is possible by scanning the angular distribution of diffracted light. This study can be applied to both amplitude measurement and spectral analysis of LWR for in-line metrology.

Original language	English
Pages (from-to)	79-84
Number of pages	6
Journal	Thin Solid Films
Volume	522
DOIs	https://doi.org/10.1016/j.tsf.2012.09.008
Publication status	Published - 2012 Nov 1

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/j.tsf.2012.09.008

Cite this

@article{8358f8461cb54f1bba696709240866bd,

title = "Off-plane diffraction of extreme ultraviolet light caused by line width roughness",

abstract = "A simple and fast method using extreme ultraviolet off-plane scatterometry for in-line line width roughness (LWR) metrology is proposed. The effect of line roughness on diffraction is numerically investigated. LWR diffracts light into the off-plane of the incidence direction, thereby causing a decrement in specular reflection. The amplitude of LWR can be quantified by detecting the decrement of the specular reflection. The angular distribution of m = 0 and n ≠ 0 diffraction orders is related to the LWR spectrum. LWR spectral analysis is possible by scanning the angular distribution of diffracted light. This study can be applied to both amplitude measurement and spectral analysis of LWR for in-line metrology.",

author = "Chen, {Wen Yu} and Lin, {Chun Hung}",

note = "Funding Information: This study was supported by the National Science Council of Taiwan under grants NSC 99-2221-E-006-249- and NSC 100-2120-M-009-010- .",

year = "2012",

month = nov,

day = "1",

doi = "10.1016/j.tsf.2012.09.008",

language = "English",

volume = "522",

pages = "79--84",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - Off-plane diffraction of extreme ultraviolet light caused by line width roughness

AU - Chen, Wen Yu

AU - Lin, Chun Hung

N1 - Funding Information: This study was supported by the National Science Council of Taiwan under grants NSC 99-2221-E-006-249- and NSC 100-2120-M-009-010- .

PY - 2012/11/1

Y1 - 2012/11/1

N2 - A simple and fast method using extreme ultraviolet off-plane scatterometry for in-line line width roughness (LWR) metrology is proposed. The effect of line roughness on diffraction is numerically investigated. LWR diffracts light into the off-plane of the incidence direction, thereby causing a decrement in specular reflection. The amplitude of LWR can be quantified by detecting the decrement of the specular reflection. The angular distribution of m = 0 and n ≠ 0 diffraction orders is related to the LWR spectrum. LWR spectral analysis is possible by scanning the angular distribution of diffracted light. This study can be applied to both amplitude measurement and spectral analysis of LWR for in-line metrology.

AB - A simple and fast method using extreme ultraviolet off-plane scatterometry for in-line line width roughness (LWR) metrology is proposed. The effect of line roughness on diffraction is numerically investigated. LWR diffracts light into the off-plane of the incidence direction, thereby causing a decrement in specular reflection. The amplitude of LWR can be quantified by detecting the decrement of the specular reflection. The angular distribution of m = 0 and n ≠ 0 diffraction orders is related to the LWR spectrum. LWR spectral analysis is possible by scanning the angular distribution of diffracted light. This study can be applied to both amplitude measurement and spectral analysis of LWR for in-line metrology.

UR - http://www.scopus.com/inward/record.url?scp=84868581379&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84868581379&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2012.09.008

DO - 10.1016/j.tsf.2012.09.008

M3 - Article

AN - SCOPUS:84868581379

SN - 0040-6090

VL - 522

SP - 79

EP - 84

JO - Thin Solid Films

JF - Thin Solid Films

ER -

Off-plane diffraction of extreme ultraviolet light caused by line width roughness

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this