Ohmic performance of ZnO and ITO/ZnO contacted with n-type GaN layer

Bang Tai Tang, Qing Xuan Yu, Hsin Ying Lee, Ching Ting Lee

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

The electrical characteristics of the ITO/ZnO multilayers contacts on n-GaN have been investigated. Ohmic behavior and the measured special contact resistance of 3×10-4 Ω cm2 were achieved for the ITO/ZnO/GaN structure annealed at 500°C for 5 min in hydrogen ambient. These results could be attributed to the ITO/n-ZnO/n-GaN isotype conjunction and the quantum confinement effect in a thin ZnO buffer layer.

Original languageEnglish
Pages (from-to)259-261
Number of pages3
JournalMaterials Science and Engineering B: Solid-State Materials for Advanced Technology
Volume82
Issue number1-3
DOIs
Publication statusPublished - 2001 May 22

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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