Abstract
The electrical characteristics of the ITO/ZnO multilayers contacts on n-GaN have been investigated. Ohmic behavior and the measured special contact resistance of 3×10-4 Ω cm2 were achieved for the ITO/ZnO/GaN structure annealed at 500°C for 5 min in hydrogen ambient. These results could be attributed to the ITO/n-ZnO/n-GaN isotype conjunction and the quantum confinement effect in a thin ZnO buffer layer.
Original language | English |
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Pages (from-to) | 259-261 |
Number of pages | 3 |
Journal | Materials Science and Engineering B: Solid-State Materials for Advanced Technology |
Volume | 82 |
Issue number | 1-3 |
DOIs | |
Publication status | Published - 2001 May 22 |
All Science Journal Classification (ASJC) codes
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering