On an indium-tin-oxide thin film based ammonia gas sensor

Cheng Wei Lin, Huey Ing Chen, Tai You Chen, Chien Chang Huang, Chi Shiang Hsu, Rong Chau Liu, Wen Chau Liu

Research output: Contribution to journalArticlepeer-review

38 Citations (Scopus)


An ammonia sensor basing on the indium tin oxide (ITO) thin film on a quartz substrate which was fabricated by RF sputtering with substrate thermal treatment, is studied and demonstrated. From the experimental results, the good NH3 sensing performances including high response of 2312%, fast response and recovery times of 73 and 104 s upon the introduction of a 1000 ppm NH3/air gas at 150 °C are observed. In comparison, the proposed sensor is superior to other previously reported ITO thin film based ammonia sensors. Due to the advantages of simple structure, easy operation, low cost, and excellent performances, the studied device gives a promising use in high-performance ammonia sensor applications.

Original languageEnglish
Pages (from-to)1481-1484
Number of pages4
JournalSensors and Actuators, B: Chemical
Issue number1
Publication statusPublished - 2011 Dec 15

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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