On an indium-tin-oxide thin film based ammonia gas sensor

Cheng Wei Lin, Huey Ing Chen, Tai You Chen, Chien Chang Huang, Chi Shiang Hsu, Rong Chau Liu, Wen Chau Liu

Research output: Contribution to journalArticle

35 Citations (Scopus)

Abstract

An ammonia sensor basing on the indium tin oxide (ITO) thin film on a quartz substrate which was fabricated by RF sputtering with substrate thermal treatment, is studied and demonstrated. From the experimental results, the good NH3 sensing performances including high response of 2312%, fast response and recovery times of 73 and 104 s upon the introduction of a 1000 ppm NH3/air gas at 150 °C are observed. In comparison, the proposed sensor is superior to other previously reported ITO thin film based ammonia sensors. Due to the advantages of simple structure, easy operation, low cost, and excellent performances, the studied device gives a promising use in high-performance ammonia sensor applications.

Original languageEnglish
Pages (from-to)1481-1484
Number of pages4
JournalSensors and Actuators, B: Chemical
Volume160
Issue number1
DOIs
Publication statusPublished - 2011 Dec 15

Fingerprint

Tin oxides
Chemical sensors
Ammonia
indium oxides
Indium
tin oxides
Oxide films
ammonia
Thin films
sensors
Sensors
thin films
gases
Quartz
Substrates
Sputtering
quartz
Gases
sputtering
recovery

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Lin, C. W., Chen, H. I., Chen, T. Y., Huang, C. C., Hsu, C. S., Liu, R. C., & Liu, W. C. (2011). On an indium-tin-oxide thin film based ammonia gas sensor. Sensors and Actuators, B: Chemical, 160(1), 1481-1484. https://doi.org/10.1016/j.snb.2011.07.041
Lin, Cheng Wei ; Chen, Huey Ing ; Chen, Tai You ; Huang, Chien Chang ; Hsu, Chi Shiang ; Liu, Rong Chau ; Liu, Wen Chau. / On an indium-tin-oxide thin film based ammonia gas sensor. In: Sensors and Actuators, B: Chemical. 2011 ; Vol. 160, No. 1. pp. 1481-1484.
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Lin, CW, Chen, HI, Chen, TY, Huang, CC, Hsu, CS, Liu, RC & Liu, WC 2011, 'On an indium-tin-oxide thin film based ammonia gas sensor', Sensors and Actuators, B: Chemical, vol. 160, no. 1, pp. 1481-1484. https://doi.org/10.1016/j.snb.2011.07.041

On an indium-tin-oxide thin film based ammonia gas sensor. / Lin, Cheng Wei; Chen, Huey Ing; Chen, Tai You; Huang, Chien Chang; Hsu, Chi Shiang; Liu, Rong Chau; Liu, Wen Chau.

In: Sensors and Actuators, B: Chemical, Vol. 160, No. 1, 15.12.2011, p. 1481-1484.

Research output: Contribution to journalArticle

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Lin CW, Chen HI, Chen TY, Huang CC, Hsu CS, Liu RC et al. On an indium-tin-oxide thin film based ammonia gas sensor. Sensors and Actuators, B: Chemical. 2011 Dec 15;160(1):1481-1484. https://doi.org/10.1016/j.snb.2011.07.041