On an indium-tin-oxide thin film based ammonia gas sensor

Cheng Wei Lin, Huey-Ing Chen, Tai You Chen, Chien Chang Huang, Chi Shiang Hsu, Rong Chau Liu, Wen-Chau Liu

Research output: Contribution to journalArticle

34 Citations (Scopus)

Abstract

An ammonia sensor basing on the indium tin oxide (ITO) thin film on a quartz substrate which was fabricated by RF sputtering with substrate thermal treatment, is studied and demonstrated. From the experimental results, the good NH3 sensing performances including high response of 2312%, fast response and recovery times of 73 and 104 s upon the introduction of a 1000 ppm NH3/air gas at 150 °C are observed. In comparison, the proposed sensor is superior to other previously reported ITO thin film based ammonia sensors. Due to the advantages of simple structure, easy operation, low cost, and excellent performances, the studied device gives a promising use in high-performance ammonia sensor applications.

Original languageEnglish
Pages (from-to)1481-1484
Number of pages4
JournalSensors and Actuators, B: Chemical
Volume160
Issue number1
DOIs
Publication statusPublished - 2011 Dec 15

Fingerprint

Tin oxides
Chemical sensors
Ammonia
indium oxides
Indium
tin oxides
Oxide films
ammonia
Thin films
sensors
Sensors
thin films
gases
Quartz
Substrates
Sputtering
quartz
Gases
sputtering
recovery

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Lin, Cheng Wei ; Chen, Huey-Ing ; Chen, Tai You ; Huang, Chien Chang ; Hsu, Chi Shiang ; Liu, Rong Chau ; Liu, Wen-Chau. / On an indium-tin-oxide thin film based ammonia gas sensor. In: Sensors and Actuators, B: Chemical. 2011 ; Vol. 160, No. 1. pp. 1481-1484.
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On an indium-tin-oxide thin film based ammonia gas sensor. / Lin, Cheng Wei; Chen, Huey-Ing; Chen, Tai You; Huang, Chien Chang; Hsu, Chi Shiang; Liu, Rong Chau; Liu, Wen-Chau.

In: Sensors and Actuators, B: Chemical, Vol. 160, No. 1, 15.12.2011, p. 1481-1484.

Research output: Contribution to journalArticle

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