On the Ammonia Gas Sensing Performance of a RF Sputtered NiO Thin-Film Sensor

Po Cheng Chou, Huey-Ing Chen, I-Ping Liu, Chun Chia Chen, Jian Kai Liou, Kai Siang Hsu, Wen-Chau Liu

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26 Citations (Scopus)

Abstract

An interesting ammonia gas sensor based on a p-type NiO thin film, prepared by a radio frequency sputtering process, is studied and demonstrated. As compared with conventional n-type metal-oxide sensors, the studied device shows comparable and good sensing performance, including a high-sensing response ratio of 289%, a lower response time of 31 s, and a lower recovery time of 78 s, under an introduced 1000 ppm NH3/air gas at 250 °C and 350 °C, respectively. In addition, the studied sensor device exhibits a lower detection limit (<5 ppm NH3/air) at 250 °C. Consequently, based on these advantages and inherent benefits of low cost, chemical stability, and easy fabrication, etc., the studied NiO thin-film sensor shows the promise for high-performance ammonia gas sensing applications.

Original languageEnglish
Article number7053906
Pages (from-to)3711-3715
Number of pages5
JournalIEEE Sensors Journal
Volume15
Issue number7
DOIs
Publication statusPublished - 2015 Jul 1

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All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

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