A hydrogen sensor based on a Pt/In0.52Al0.48As Schottky diode with a thin (50 Å) Pt catalytic metal is studied and presented. Because of the inherent properties of Pt (high work function) and In0.52Al0.48As (large bandgap), the studied device demonstrates considerable benefits including low hydrogen gas detection limit (<14ppm H2/air), high sensitivity (1974% under 9970ppm H 2/air gas), wide operating temperature range (≥ 160°C), fast response time (≤4s), and widespread reverse voltage operating regime (-0.5 to -5 V). In addition, surface morphology and piezoelectric effect play key roles in the hydrogen sensing performance. Compared with similar devices with thicker (100 Å) Pt metal, the studied sensor device exhibits a higher hydrogen detection sensitivity under lower hydrogen concentration (≤1000 ppm H 2/air) environments.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)