On the temperature compensation of parallel piezoresistive microcantilevers in biosensors

Shih-Ming Yang, C. Chang, T. I. Yin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Microcantilever with embedded piezoresistor has been applied to in-situ surface stress measurement of biochemical reaction, where parallel microcantilever design by using an active cantilever for biosensing and another reference cantilever for noise cancellation has previously been proposed. This paper shows that the measurement is sensitive to the temperature effect induced by the piezoresistor. The temperature difference between the two cantilevers can reach 40°C at 10V operation because of their difference thermal capacitance. For the microcantilever of 125×65×0.75 μm, the offset voltage of the parallel microcantilever is 1.65 mV and the temperature drift is 0.01 mV/°C. An improved parallel microcantilever design is developed using the stripe pattern design on the immobilized layer and the signal conditioning circuit for temperature compensation in biosensors. Analyses and experiments show that the performance of a CMOS sensor chip can be significantly improved.

Original languageEnglish
Title of host publication2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007
Pages693-717
Number of pages25
DOIs
Publication statusPublished - 2008 Jun 13
Event19th Int. Conf. Design Theory and Methodology and 1st Int. Conf. Micro and Nano Systems, presented at - 2007 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2007 - Las Vegas, NV, United States
Duration: 2007 Sep 42007 Sep 7

Publication series

Name2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007
Volume3 PART A

Other

Other19th Int. Conf. Design Theory and Methodology and 1st Int. Conf. Micro and Nano Systems, presented at - 2007 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2007
CountryUnited States
CityLas Vegas, NV
Period07-09-0407-09-07

All Science Journal Classification (ASJC) codes

  • Computer Graphics and Computer-Aided Design
  • Computer Science Applications
  • Mechanical Engineering
  • Modelling and Simulation

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    Yang, S-M., Chang, C., & Yin, T. I. (2008). On the temperature compensation of parallel piezoresistive microcantilevers in biosensors. In 2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007 (pp. 693-717). (2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007; Vol. 3 PART A). https://doi.org/10.1115/DETC2007-34454