On the unification of material strength testing for MEMS applications

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Abstract

In MEMS, the geometry and applied loads between strength testing coupon and structures for design are usually different and the strength data cannot be directly applied without modification for designing brittle MEMS structures. In this paper, a method based on equal failure probability is proposed to find the equivalent strength for design by scaling the test strength with a parameter called stress ratio. By the same approach, it is also possible to correlate MEMS material strength data obtained by different testing schemes.

Original languageEnglish
Pages (from-to)101-106
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume687
Publication statusPublished - 2002 Sep 10
EventMaterials Science of Microelectromechanical Systems (MEMS) Devices IV - Boston, MA, United States
Duration: 2001 Nov 252001 Nov 28

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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