Abstract
In MEMS, the geometry and applied loads between strength testing coupon and structures for design are usually different and the strength data cannot be directly applied without modification for designing brittle MEMS structures. In this paper, a method based on equal failure probability is proposed to find the equivalent strength for design by scaling the test strength with a parameter called stress ratio. By the same approach, it is also possible to correlate MEMS material strength data obtained by different testing schemes.
| Original language | English |
|---|---|
| Pages (from-to) | 101-106 |
| Number of pages | 6 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 687 |
| Publication status | Published - 2002 |
| Event | Materials Science of Microelectromechanical Systems (MEMS) Devices IV - Boston, MA, United States Duration: 2001 Nov 25 → 2001 Nov 28 |
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering