On the unification of material strength testing for MEMS applications

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In MEMS, the geometry and applied loads between strength testing coupon and structures for design are usually different and the strength data cannot be directly applied without modification for designing brittle MEMS structures. In this paper, a method based on equal failure probability is proposed to find the equivalent strength for design by scaling the test strength with a parameter called stress ratio. By the same approach, it is also possible to correlate MEMS material strength data obtained by different testing schemes.

Original languageEnglish
Pages (from-to)101-106
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume687
Publication statusPublished - 2002

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microelectromechanical systems
MEMS
Strength of materials
mechanical properties
Testing
stress ratio
Geometry
scaling
geometry

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

Cite this

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title = "On the unification of material strength testing for MEMS applications",
abstract = "In MEMS, the geometry and applied loads between strength testing coupon and structures for design are usually different and the strength data cannot be directly applied without modification for designing brittle MEMS structures. In this paper, a method based on equal failure probability is proposed to find the equivalent strength for design by scaling the test strength with a parameter called stress ratio. By the same approach, it is also possible to correlate MEMS material strength data obtained by different testing schemes.",
author = "Kuo-Shen Chen",
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On the unification of material strength testing for MEMS applications. / Chen, Kuo-Shen.

In: Materials Research Society Symposium - Proceedings, Vol. 687, 2002, p. 101-106.

Research output: Contribution to journalArticle

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