Open-ended MEMS probes for dielectric spectroscopy of biological cells at radio frequencies

Hsin Hung Li, Jen Yu Jao, Ming Kun Chen, Ling Sheng Jang, Yi Chu Hsu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

When an electrical current with a low frequency is applied to a cell, the current passes through the outside of the cell. Thus, impedance measurements at low frequencies cannot be used to determine the pathological change of the cellular organelle taking place inside the cell. However, increasing the frequency of the electrical current makes the capacitive impedance of the cell decrease, allowing the electrical current to flow through the cell. This study presents the design and fabrication of a microfluidic device integrated with a coplanar waveguide open-ended MEMS probe for the impedance measurement of the single HeLa cell at radio frequencies. The device includes a PDMS cover with a microchannel and microstructures to capture the single HeLa cell and a conductor-backed CPW fabricated using a silicon chip and two PCB boards. The effects of the substrate on the characteristic impedance of the CBCPW structure were investigated under three conditions by utilizing a Time-Domain Reflectometer (TDR) to obtain the characteristic impedance of the device (46.43 Ω). Finally, impedance measurements using the proposed device and a vector network analyzer (VNA) are demonstrated for sodium chloride solutions with different concentrations, DI water, alcohol, PBS, and a single HeLa cell.

Original languageEnglish
Title of host publicationProgress in Electromagnetics Research Symposium 2009, PIERS 2009 Beijing
PublisherElectromagnetics Academy
Pages775-779
Number of pages5
ISBN (Print)9781618390554
Publication statusPublished - 2009 Jan 1
EventProgress in Electromagnetics Research Symposium 2009, PIERS 2009 Beijing - Beijing, China
Duration: 2009 Mar 232009 Mar 27

Publication series

NameProgress in Electromagnetics Research Symposium
Volume1
ISSN (Print)1559-9450

Other

OtherProgress in Electromagnetics Research Symposium 2009, PIERS 2009 Beijing
CountryChina
CityBeijing
Period09-03-2309-03-27

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Li, H. H., Jao, J. Y., Chen, M. K., Jang, L. S., & Hsu, Y. C. (2009). Open-ended MEMS probes for dielectric spectroscopy of biological cells at radio frequencies. In Progress in Electromagnetics Research Symposium 2009, PIERS 2009 Beijing (pp. 775-779). (Progress in Electromagnetics Research Symposium; Vol. 1). Electromagnetics Academy.