Optical filter responses of InGaAsP microdisk resonators fabricated by polymer wafer bonding

Y. Ma, G. Chang, S. Chang, S. T. Ho

Research output: Contribution to conferencePaperpeer-review

Abstract

Optical filters based on InGaAsP microdisk resonators with 10 μm and 5 μm diameters have been fabricated using polymer wafer bonding process. Narrow linewidth of 0.22nm and large free spectral range of 38nm near 1.55 μm are obtained. These devices are potentially useful as wavelength add-drop filters.

Original languageEnglish
PagesWY4/1-WY4/3
Publication statusPublished - 2001
EventOptical Fiber Conference - Anaheim, CA, United States
Duration: 2001 Mar 172001 Mar 22

Other

OtherOptical Fiber Conference
Country/TerritoryUnited States
CityAnaheim, CA
Period01-03-1701-03-22

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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