TY - JOUR
T1 - Optical interference system for simultaneously measuring refractive index and thickness of slim transparent plate
AU - Jan, Chia Ming
AU - Liu, Chien Sheng
AU - Chen, Chun Lin
AU - Chen, Yu Ta
N1 - Funding Information:
The authors gratefully acknowledge the financial support provided by the Ministry of Science and Technology of Taiwan under Grant Nos. MOST 105 - 2221 - E - 194 - 013 - MY5 , 106 - 2628 - E - 194 - 001 - MY3 , 108 - 2218 - E - 002 - 071 , and 109 - 2218 - E - 002 - 006 .
Publisher Copyright:
© 2021
PY - 2021/10
Y1 - 2021/10
N2 - Measuring the refractive index and thickness of transparent materials is essential in offline or online automated inspection in the manufacturing and industrial fields. We recently developed a novel optical system with two optical paths for simultaneously measuring the refractive index and thickness (>1 mm) of a transparent plate; the developed system allowed for better thickness measurement with a simpler structure and lower cost (C. S. Liu, R. C. Song, and S. J. Fu, Appl. Phys. B 125, 199, 2019). In the present study, the thickness range that can be measured using the developed optical system is reduced to ≤100 μm by using interference methods instead of triangulation methods. The proposed optical interference system is characterized numerically using simulations on the commercial software program ZEMAX and then experimentally tested using a laboratory-built prototype. The experiment results show that the refractive indexes and the thicknesses of the slim transparent plates (thickness ≤ 100 μm) were measured with high accuracy (with maximum measurement errors of 0.0007 and 3 μm for a refractive index n and thickness d, respectively). Consequently, the proposed optical interference system has the potential to be used in the automated inspection of slim transparent materials.
AB - Measuring the refractive index and thickness of transparent materials is essential in offline or online automated inspection in the manufacturing and industrial fields. We recently developed a novel optical system with two optical paths for simultaneously measuring the refractive index and thickness (>1 mm) of a transparent plate; the developed system allowed for better thickness measurement with a simpler structure and lower cost (C. S. Liu, R. C. Song, and S. J. Fu, Appl. Phys. B 125, 199, 2019). In the present study, the thickness range that can be measured using the developed optical system is reduced to ≤100 μm by using interference methods instead of triangulation methods. The proposed optical interference system is characterized numerically using simulations on the commercial software program ZEMAX and then experimentally tested using a laboratory-built prototype. The experiment results show that the refractive indexes and the thicknesses of the slim transparent plates (thickness ≤ 100 μm) were measured with high accuracy (with maximum measurement errors of 0.0007 and 3 μm for a refractive index n and thickness d, respectively). Consequently, the proposed optical interference system has the potential to be used in the automated inspection of slim transparent materials.
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U2 - 10.1016/j.optlaseng.2021.106668
DO - 10.1016/j.optlaseng.2021.106668
M3 - Article
AN - SCOPUS:85105497862
SN - 0143-8166
VL - 145
JO - Optics and Lasers in Engineering
JF - Optics and Lasers in Engineering
M1 - 106668
ER -