Optical properties of Y2O3 thin films doped with spatially controlled Er3+ by atomic layer deposition

J. Hoang, T. T. Van, M. Sawkar-Mathur, B. Hoex, M. C.M. Van De Sanden, W. M.M. Kessels, R. Ostroumov, K. L. Wang, J. R. Bargar, J. P. Chang

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23 Citations (Scopus)


We report in this work the optical properties of Er3+ -doped Y2 O3, deposited by radical enhanced atomic layer deposition. Specifically, the 1.53 μm absorption cross section of Er3+ in Y2 O3 was measured by cavity ring-down spectroscopy to be (1.9±0.5) × 10-20 cm2, about two times that for Er3+ in Si O2. This is consistent with the larger Er3+ effective absorption cross section at 488 nm, determined based on the 1.53 μm photoluminescence yield as a function of the pump power. X-ray photoelectron spectroscopy and Rutherford backscattering spectroscopy were used to determine the film composition, which in turn was used to analyze the extended x-ray absorption fine structure data, showing that Er was locally coordinated to only O in the first shell and its second shell was a mixture of Y and Er. These results demonstrated that the optical properties of Er3+ -doped Y2 O3 are enhanced, likely due to the fully oxygen coordinated, spatially controlled, and uniformly distributed Er3+ dopants in the host. These findings are likely universal in rare-earth doped oxide materials, making it possible to design materials with improved optical properties for their use in optoelectronic devices.

Original languageEnglish
Article number123116
JournalJournal of Applied Physics
Issue number12
Publication statusPublished - 2007

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)


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