Optimal design and operation for a no-moving-parts-valve (NMPV) micro-pump with a diffuser width of 500 μm

A no-moving-parts-valve (NMPV) with a diffuser width of D = 500 microns was investigated in this study by numerical simulations at Reynolds numbers, Re_D, ranging from 20 to 75, and expansion valve angles ranging from 30° < θ₁ < 57° and 110° < θ₂ < 120°. The D^p,i value, 1.02 < D^p,i < 1.14, is larger within the proposed range of the expansion valve angles. A flow channel structure with a depth of 500 micron is manufactured using yellow light lithography in this study. From prior analyses and experiments, it is found that piezoelectric films work better at a buzz driving frequency of f < 30Hz and the best operating frequency is at a driving frequency of f = 10Hz because it produces the largest net flow. In addition, the expansion angles θ₁ = 30° and θ₂ = 120° are the best expansion angles because they produce the largest net flow. These related results are very helpful for the actual design of no-moving-parts-valve micro-pump.