Optimal design of piezoelectric actuator for precision positioning applications

Lien Kai Chang, Mi Ching Tsai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Recent advances in measurement systems require positioning systems with high stiffness, accuracy and speed. Piezoelectric actuators which are featured with mechanical simplicity, quick response, and electromagnetic immunity, are often used in precision positioning. It is known that piezoelectric actuators can achieve high positioning accuracy by the stepping mode but low speed. By contrast, the resonance vibration mode will offer high positioning speed, but sacrifices the high inherent position resolution. For the stepping mode, the displacement of the piezoelectric actuator significantly affects the speed, of which larger displacement induces higher speed. For the resonance vibration mode, an elliptical motion of the piezoelectric actuator tip is generated by horizontal and vertical eigenmodes, and the optimal efficiency can be achieved when the two eigenmodes are operated at the same frequency. For the applications of high positioning accuracy and speed, a piezoelectric actuator should be designed by taking these two operation modes into consideration simultaneously. Based on these requirements, the optimal structural dimensions of a piezoelectric actuator are obtained using a genetic algorithm.

Original languageEnglish
Title of host publicationPrecision Engineering and Nanotechnology V
PublisherTrans Tech Publications Ltd
Pages224-229
Number of pages6
ISBN (Print)9783038352112
DOIs
Publication statusPublished - 2015
Event5th International Conference on Asian Society for Precision Engineering and Nanotechnology, ASPEN 2013 - Taipei, Taiwan
Duration: 2013 Nov 122013 Nov 15

Publication series

NameKey Engineering Materials
Volume625
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Other

Other5th International Conference on Asian Society for Precision Engineering and Nanotechnology, ASPEN 2013
Country/TerritoryTaiwan
CityTaipei
Period13-11-1213-11-15

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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