Optimization of post-N2 treatment and undoped-Si-glass cap to improve metal wring delamination in deep submicron high-density plasma-fluorinated silica glass intermetal dielectric application

Yi Lung Cheng, Ying Lang Wang, Jin Kun Lan, Sze Au Wu, Shih Chieh Chang, Kuang Yao Lo, Ming Shiann Feng

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Physics & Astronomy

Engineering & Materials Science