Opto-electromagnetic properties of carbon-doped zinc-oxide prepared using electrically induced crystallization and ion implantation process for gas sensor application

Tai Hsiang Liu, Fei Yi Hung, Tao Chien, Kuan Jen Chen

Research output: Contribution to journalArticle

Abstract

A double-layer carbon-doped zinc oxide (ZnO/C) film structure was prepared using electrically induced crystallization (EIC) diffusion. The bottom layer atoms (C) were doped into the ZnO crystal structure, inducing intrinsic ferromagnetic characteristics and enhancing optical and electrical properties. The ion implantation process for ZnO/C is discussed in terms of optical, electrical, and magnetic performance. The sensitivity and switching speed of ZnO/C for sensing a volatile gas (alcohol) are evaluated. The EIC process leads to better sensitivity compared to those obtained with annealing and the ion implantation process.

Original languageEnglish
JournalJournal of Materials Science: Materials in Electronics
DOIs
Publication statusAccepted/In press - 2019 Jan 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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