Opto-electromagnetic properties of carbon-doped zinc-oxide prepared using electrically induced crystallization and ion implantation process for gas sensor application

Tai Hsiang Liu, Fei Yi Hung, Tao Chien, Kuan Jen Chen

Research output: Contribution to journalArticle

Abstract

A double-layer carbon-doped zinc oxide (ZnO/C) film structure was prepared using electrically induced crystallization (EIC) diffusion. The bottom layer atoms (C) were doped into the ZnO crystal structure, inducing intrinsic ferromagnetic characteristics and enhancing optical and electrical properties. The ion implantation process for ZnO/C is discussed in terms of optical, electrical, and magnetic performance. The sensitivity and switching speed of ZnO/C for sensing a volatile gas (alcohol) are evaluated. The EIC process leads to better sensitivity compared to those obtained with annealing and the ion implantation process.

Original languageEnglish
JournalJournal of Materials Science: Materials in Electronics
DOIs
Publication statusAccepted/In press - 2019 Jan 1

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Zinc Oxide
electromagnetic properties
Crystallization
Zinc oxide
Chemical sensors
Ion implantation
zinc oxides
ion implantation
implantation
Carbon
crystallization
carbon
sensitivity
sensors
gases
Electric properties
alcohols
Alcohols
Optical properties
Crystal structure

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

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abstract = "A double-layer carbon-doped zinc oxide (ZnO/C) film structure was prepared using electrically induced crystallization (EIC) diffusion. The bottom layer atoms (C) were doped into the ZnO crystal structure, inducing intrinsic ferromagnetic characteristics and enhancing optical and electrical properties. The ion implantation process for ZnO/C is discussed in terms of optical, electrical, and magnetic performance. The sensitivity and switching speed of ZnO/C for sensing a volatile gas (alcohol) are evaluated. The EIC process leads to better sensitivity compared to those obtained with annealing and the ion implantation process.",
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AU - Liu, Tai Hsiang

AU - Hung, Fei Yi

AU - Chien, Tao

AU - Chen, Kuan Jen

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AB - A double-layer carbon-doped zinc oxide (ZnO/C) film structure was prepared using electrically induced crystallization (EIC) diffusion. The bottom layer atoms (C) were doped into the ZnO crystal structure, inducing intrinsic ferromagnetic characteristics and enhancing optical and electrical properties. The ion implantation process for ZnO/C is discussed in terms of optical, electrical, and magnetic performance. The sensitivity and switching speed of ZnO/C for sensing a volatile gas (alcohol) are evaluated. The EIC process leads to better sensitivity compared to those obtained with annealing and the ion implantation process.

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