Origin of stress memorization mechanism in strained-Si nMOSFETs using a low-cost stress-memorization technique

Yao Tsung Huang, San Lein Wu, Shoou Jinn Chang, Cheng Wen Kuo, Ya Ting Chen, Yao Chin Cheng, Osbert Cheng

Research output: Contribution to journalArticle

6 Citations (Scopus)

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Engineering & Materials Science