Particle-in-cell simulations of electron-cyclotron-resonance microwave plasma generation

Y. Hu, J. H. Shiau, T. L. Lin, Y. C. Lan

Research output: Contribution to journalConference article

Abstract

The objective of this work is to develop a 2d3v computer program to simulate the electron cyclotron resonance (ECR) plasma source. This computer code incorporates a static magnetic field solver for the magnetic field produced by permanent magnets, particle-in-cell (PIC) plasma simulations, and Monte Carlo collisions. The collisional model includes not only collisions of plasma electrons with neutrals, but also electron-electron collisions.

Original languageEnglish
Number of pages1
JournalIEEE International Conference on Plasma Science
Publication statusPublished - 1996 Jan 1
EventProceedings of the 1996 IEEE International Conference on Plasma Science - Boston, MA, USA
Duration: 1996 Jun 31996 Jun 5

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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