TY - GEN
T1 - Performance advantage and energy saving of triangular-shaped FinFETs
AU - Wu, Kehuey
AU - Ding, Wei Wen
AU - Chiang, Meng Hsueh
PY - 2013
Y1 - 2013
N2 - Detailed comparisons of FinFETs with triangular and rectangular fins were performed using numerical simulations. Although, with the same leakage current (Ioff), the on current (Idsat) of the triangular fin is less than that of the rectangular one, the 3-stage ring oscillator (RO) with triangular fins runs faster than the one with rectangular fins and consumes less energy due to better short channel control and smaller parasitic capacitance. In addition, with the triangular shape, the two side-channel surfaces are no longer (110) and benefit from reduced negative bias temperature instability (NBTI). All these make the FinFET with a triangular fin a smart choice.
AB - Detailed comparisons of FinFETs with triangular and rectangular fins were performed using numerical simulations. Although, with the same leakage current (Ioff), the on current (Idsat) of the triangular fin is less than that of the rectangular one, the 3-stage ring oscillator (RO) with triangular fins runs faster than the one with rectangular fins and consumes less energy due to better short channel control and smaller parasitic capacitance. In addition, with the triangular shape, the two side-channel surfaces are no longer (110) and benefit from reduced negative bias temperature instability (NBTI). All these make the FinFET with a triangular fin a smart choice.
UR - http://www.scopus.com/inward/record.url?scp=84891122704&partnerID=8YFLogxK
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U2 - 10.1109/SISPAD.2013.6650595
DO - 10.1109/SISPAD.2013.6650595
M3 - Conference contribution
AN - SCOPUS:84891122704
SN - 9781467357364
T3 - International Conference on Simulation of Semiconductor Processes and Devices, SISPAD
SP - 143
EP - 146
BT - 2013 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2013
T2 - 18th International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2013
Y2 - 3 September 2013 through 5 September 2013
ER -