Performance enhancement of multiple-gate ZnO metal-oxide-semiconductor field-effect transistors fabricated using self-aligned and laser interference photolithography techniques

Hsin-Ying Lee, Hung Lin Huang, Chun Yen Tseng

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The simple self-aligned photolithography technique and laser interference photolithography technique were proposed and utilized to fabricate multiple-gate ZnO metal-oxide-semiconductor field-effect transistors (MOSFETs). Since the multiple-gate structure could improve the electrical field distribution along the ZnO channel, the performance of the ZnO MOSFETs could be enhanced. The performance of the multiple-gate ZnO MOSFETs was better than that of the conventional single-gate ZnO MOSFETs. The higher the drain-source saturation current (12.41 mA/mm), the higher the transconductance (5.35 mS/mm) and the lower the anomalous off-current (5.7 μA/mm) for the multiple-gate ZnO MOSFETs were obtained.

Original languageEnglish
Pages (from-to)1-6
Number of pages6
JournalNanoscale Research Letters
Volume9
Issue number1
DOIs
Publication statusPublished - 2014 Jan 1

Fingerprint

MOSFET devices
Photolithography
photolithography
metal oxide semiconductors
field effect transistors
interference
Lasers
augmentation
lasers
Transconductance
transconductance
saturation

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics

Cite this

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