Abstract
An infrared (IR) sensor with the lead-titanate (PbTiO3) thin-film using the technology of micro-eletro-mechanical systems to achieve a better thermal isolation structure has been fabricated and developed. The major IR-sensing part on the cantilever beam with dimensions of 200 × 100 × 2 μm3 consists of a 500-Å PbTiO3 layer deposited by RF sputtering, and an evaporated bismuth (Bi) layer. This thermal isolation improved structure exhibits a much superior performance to that of a traditional IR-sensing bulk structure on the experimental results, which show a 200% and 300% improvement in current gain under the incident optical power 500 μW and 6 V applied bias at room temperature and 77°K, respectively.
Original language | English |
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Pages (from-to) | 236-243 |
Number of pages | 8 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 3419 |
DOIs | |
Publication status | Published - 1998 Dec 1 |
Event | Optoelectronic Materials and Devices - Taipei, Taiwan Duration: 1998 Jul 9 → 1998 Jul 11 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering