Performance improvement analyses for a cleanroom in MEMS laboratory

Fu Jen Wang, Chi Ming Lai, Yuan Hong Luo, Zhuan Ru Liu, Yin Rui Zheng

Research output: Contribution to journalArticlepeer-review


It is vital to provide particles-free conditions for modern manufacturing industries as well as for micro-electro-mechanical system (MEMS). However, improvement for contamination control is required invariably due to the high particle counts at specific sampling locations. In this study, field measurement and computational fluid dynamics (CFD) simulation were conducted to investigate the ventilating performance through airflow distribution and concentration contours of the cleanroom in MEMS laboratory. Improvement strategies with less expenditure have been proposed and assessed comprehensively. The results revealed that the improvement of airflow and concentration distribution could be achieved by increasing the number of fan-filter units and proper arrangement of the return air grilles as well. Ventilation performance could be assessed and evaluated extensively also by the calculation of contamination concentration decay at specific sample locations. It was also expected that CFD aided simulation could identify strategies for best practice as well as reduce trial-and-error effort while modification of cleanroom was conducted.

Original languageEnglish
Pages (from-to)135-142
Number of pages8
JournalJournal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Issue number2
Publication statusPublished - 2009 Apr

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering


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