Performance Improvement of Co-Sputtering AlGaZnO Solar-Blind Photodetectors

Shu Bai Liu, Chia Hsun Chen, Sheng Po Chang, Chen Hao Li, Shoou Jinn Chang

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


The author reported the AlGaZnO photodetector characteristics with various AGO:ZnO co-sputtering power ratio. It was found the optimized on/off ratio and responsivity were about 3.64 × 10{5} and 0.15 A/W, respectively, at the 10 V applied bias, and with AGO:ZnO power ratio of 80 W:50 W. The UV to visible rejection ratio was 8.08 × 10{3} , indicated the significant response under UV illumination. The on/off ratio and responsivity could further be improved to 4.2 × 10{6} and 0.44 A/W, respectively, by annealed at 300°C for an hour, to decrease the defect in the AGZO film. Besides, the photoresponse of the AGZO photodetectors also showed a repeatable and stable switching characteristic. These results indicate the performance of AGZO photodetector were good, and can be a good candidate for low cost, fast fabricated solar-blind application.

Original languageEnglish
Article number9455387
Pages (from-to)18682-18687
Number of pages6
JournalIEEE Sensors Journal
Issue number17
Publication statusPublished - 2021 Sept 1

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering


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